Measurement of ac ion current from a corona ionizer using a Faraday cage

The use of ac ionizers operating at high frequency has become common in the semiconductor industry. The mechanism by which equipment neutralizes charge, however, is not well understood, because ac induction interferes with the measurement of extremely small ion currents. In this work, we use a Farad...

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Veröffentlicht in:	Journal of electrostatics 2008-05, Vol.66 (5), p.275-282
Hauptverfasser:	Asano, Kazutoshi, Fukada, Yoshinari, Yasukawa, Takashi
Format:	Artikel
Sprache:	eng
Schlagworte:	AC corona Charge Charge neutralization Corona Coronas Electric potential Faraday cage Ion currents Ionizer Ionizers Semiconductors Voltage
Online-Zugang:	Volltext
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