Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs
Tunable vertical cavity devices including an air-gap integrated in the cavity have been designed, fabricated, and investigated. The ultrawide wavelength tuning is realized by micromechanical actuation of Bragg mirror membranes. Based on optical and mechanical model calculations, the air-gap filters...
Gespeichert in:
| Veröffentlicht in: | IEEE journal of selected topics in quantum electronics 2003-05, Vol.9 (3), p.918-928 |
|---|---|
| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 928 |
|---|---|
| container_issue | 3 |
| container_start_page | 918 |
| container_title | IEEE journal of selected topics in quantum electronics |
| container_volume | 9 |
| creator | Prott, C. Romer, F. Ataro, E.O. Daleiden, J. Irmer, S. Tarraf, A. Hillmer, H. |
| description | Tunable vertical cavity devices including an air-gap integrated in the cavity have been designed, fabricated, and investigated. The ultrawide wavelength tuning is realized by micromechanical actuation of Bragg mirror membranes. Based on optical and mechanical model calculations, the air-gap filters and vertical cavity surface emitting lasers (VCSELs) are designed for investigating mainly the optical tuning efficiency. In our research, we focus on two different mirror material systems, dielectric Si/sub 3/N/sub 4//SiO/sub 2/ and InP/air-gap Bragg mirrors and on two tuning concepts, respectively. For the dielectric mirrors, continuous tuning is achieved by thermal actuation of the Si/sub 3/N/sub 4//SiO/sub 2/ mirror membranes, and for InP/air-gap mirrors, electrostatic actuation of the InP membranes is used. To verify the optical and mechanical simulations, InP/air-gap filters are characterized by measuring reflectance spectra and the tuning behavior. The measured results agree with the simulations used to optimize the micromechanical and optical characteristics of air-gap filters and VCSELs for optical communication applications. |
| doi_str_mv | 10.1109/JSTQE.2003.818848 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_miscellaneous_901673651</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1250494</ieee_id><sourcerecordid>901673651</sourcerecordid><originalsourceid>FETCH-LOGICAL-c450t-2fdfdfffa3ef2a20d99de791246301429a4f038287ca4746335b4dc8eb6710e83</originalsourceid><addsrcrecordid>eNqN0U1LAzEQBuBFFKzVHyBeggc9bZ187G5ylFI_SkWkVbyFdDcpKXG3JruV_ntTKwgeRHKYMDwzIbxJcophgDGIq_F09jQaEAA64JhzxveSHs4ynrKMkf14h6JISQ6vh8lRCEsAiAZ6yfihqbSz9QI1BnWu9erDxsYGtV2t5k6jtfatLZVDpVrbdoOU9elCrZCxrtU-IFVX6GU4HU3CcXJglAv65Lv2k-eb0Wx4l04eb--H15O0ZBm0KTFVPMYoqg1RBCohKl0ITFhOATMiFDNAOeFFqVgRmzSbs6rkep4XGDSn_eRyt3flm_dOh1a-2VBq51Stmy5IATgvaJ7hKC_-lPENIUjO_gEpB0ZphOe_4LLpfB2_KwUhImeARUR4h0rfhOC1kStv35TfSAxym5b8Sktu05K7tOLM2W7Gaq1_PMmACUY_AXzSj20</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>922964019</pqid></control><display><type>article</type><title>Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs</title><source>IEEE Electronic Library (IEL)</source><creator>Prott, C. ; Romer, F. ; Ataro, E.O. ; Daleiden, J. ; Irmer, S. ; Tarraf, A. ; Hillmer, H.</creator><creatorcontrib>Prott, C. ; Romer, F. ; Ataro, E.O. ; Daleiden, J. ; Irmer, S. ; Tarraf, A. ; Hillmer, H.</creatorcontrib><description>Tunable vertical cavity devices including an air-gap integrated in the cavity have been designed, fabricated, and investigated. The ultrawide wavelength tuning is realized by micromechanical actuation of Bragg mirror membranes. Based on optical and mechanical model calculations, the air-gap filters and vertical cavity surface emitting lasers (VCSELs) are designed for investigating mainly the optical tuning efficiency. In our research, we focus on two different mirror material systems, dielectric Si/sub 3/N/sub 4//SiO/sub 2/ and InP/air-gap Bragg mirrors and on two tuning concepts, respectively. For the dielectric mirrors, continuous tuning is achieved by thermal actuation of the Si/sub 3/N/sub 4//SiO/sub 2/ mirror membranes, and for InP/air-gap mirrors, electrostatic actuation of the InP membranes is used. To verify the optical and mechanical simulations, InP/air-gap filters are characterized by measuring reflectance spectra and the tuning behavior. The measured results agree with the simulations used to optimize the micromechanical and optical characteristics of air-gap filters and VCSELs for optical communication applications.</description><identifier>ISSN: 1077-260X</identifier><identifier>EISSN: 1558-4542</identifier><identifier>DOI: 10.1109/JSTQE.2003.818848</identifier><identifier>CODEN: IJSQEN</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Actuation ; Air gaps ; Biomembranes ; Dielectrics ; Holes ; Indium phosphide ; Indium phosphides ; Laser tuning ; Membranes ; Micromechanical devices ; Mirrors ; Optical filters ; Optical tuning ; Optical wireless ; Silicon nitride ; Simulation ; Technological change ; Tunable circuits and devices ; Tuning ; Vertical cavity surface emitting lasers</subject><ispartof>IEEE journal of selected topics in quantum electronics, 2003-05, Vol.9 (3), p.918-928</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2003</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c450t-2fdfdfffa3ef2a20d99de791246301429a4f038287ca4746335b4dc8eb6710e83</citedby><cites>FETCH-LOGICAL-c450t-2fdfdfffa3ef2a20d99de791246301429a4f038287ca4746335b4dc8eb6710e83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1250494$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1250494$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Prott, C.</creatorcontrib><creatorcontrib>Romer, F.</creatorcontrib><creatorcontrib>Ataro, E.O.</creatorcontrib><creatorcontrib>Daleiden, J.</creatorcontrib><creatorcontrib>Irmer, S.</creatorcontrib><creatorcontrib>Tarraf, A.</creatorcontrib><creatorcontrib>Hillmer, H.</creatorcontrib><title>Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs</title><title>IEEE journal of selected topics in quantum electronics</title><addtitle>JSTQE</addtitle><description>Tunable vertical cavity devices including an air-gap integrated in the cavity have been designed, fabricated, and investigated. The ultrawide wavelength tuning is realized by micromechanical actuation of Bragg mirror membranes. Based on optical and mechanical model calculations, the air-gap filters and vertical cavity surface emitting lasers (VCSELs) are designed for investigating mainly the optical tuning efficiency. In our research, we focus on two different mirror material systems, dielectric Si/sub 3/N/sub 4//SiO/sub 2/ and InP/air-gap Bragg mirrors and on two tuning concepts, respectively. For the dielectric mirrors, continuous tuning is achieved by thermal actuation of the Si/sub 3/N/sub 4//SiO/sub 2/ mirror membranes, and for InP/air-gap mirrors, electrostatic actuation of the InP membranes is used. To verify the optical and mechanical simulations, InP/air-gap filters are characterized by measuring reflectance spectra and the tuning behavior. The measured results agree with the simulations used to optimize the micromechanical and optical characteristics of air-gap filters and VCSELs for optical communication applications.</description><subject>Actuation</subject><subject>Air gaps</subject><subject>Biomembranes</subject><subject>Dielectrics</subject><subject>Holes</subject><subject>Indium phosphide</subject><subject>Indium phosphides</subject><subject>Laser tuning</subject><subject>Membranes</subject><subject>Micromechanical devices</subject><subject>Mirrors</subject><subject>Optical filters</subject><subject>Optical tuning</subject><subject>Optical wireless</subject><subject>Silicon nitride</subject><subject>Simulation</subject><subject>Technological change</subject><subject>Tunable circuits and devices</subject><subject>Tuning</subject><subject>Vertical cavity surface emitting lasers</subject><issn>1077-260X</issn><issn>1558-4542</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2003</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqN0U1LAzEQBuBFFKzVHyBeggc9bZ187G5ylFI_SkWkVbyFdDcpKXG3JruV_ntTKwgeRHKYMDwzIbxJcophgDGIq_F09jQaEAA64JhzxveSHs4ynrKMkf14h6JISQ6vh8lRCEsAiAZ6yfihqbSz9QI1BnWu9erDxsYGtV2t5k6jtfatLZVDpVrbdoOU9elCrZCxrtU-IFVX6GU4HU3CcXJglAv65Lv2k-eb0Wx4l04eb--H15O0ZBm0KTFVPMYoqg1RBCohKl0ITFhOATMiFDNAOeFFqVgRmzSbs6rkep4XGDSn_eRyt3flm_dOh1a-2VBq51Stmy5IATgvaJ7hKC_-lPENIUjO_gEpB0ZphOe_4LLpfB2_KwUhImeARUR4h0rfhOC1kStv35TfSAxym5b8Sktu05K7tOLM2W7Gaq1_PMmACUY_AXzSj20</recordid><startdate>20030501</startdate><enddate>20030501</enddate><creator>Prott, C.</creator><creator>Romer, F.</creator><creator>Ataro, E.O.</creator><creator>Daleiden, J.</creator><creator>Irmer, S.</creator><creator>Tarraf, A.</creator><creator>Hillmer, H.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>7QQ</scope><scope>JG9</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20030501</creationdate><title>Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs</title><author>Prott, C. ; Romer, F. ; Ataro, E.O. ; Daleiden, J. ; Irmer, S. ; Tarraf, A. ; Hillmer, H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c450t-2fdfdfffa3ef2a20d99de791246301429a4f038287ca4746335b4dc8eb6710e83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2003</creationdate><topic>Actuation</topic><topic>Air gaps</topic><topic>Biomembranes</topic><topic>Dielectrics</topic><topic>Holes</topic><topic>Indium phosphide</topic><topic>Indium phosphides</topic><topic>Laser tuning</topic><topic>Membranes</topic><topic>Micromechanical devices</topic><topic>Mirrors</topic><topic>Optical filters</topic><topic>Optical tuning</topic><topic>Optical wireless</topic><topic>Silicon nitride</topic><topic>Simulation</topic><topic>Technological change</topic><topic>Tunable circuits and devices</topic><topic>Tuning</topic><topic>Vertical cavity surface emitting lasers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Prott, C.</creatorcontrib><creatorcontrib>Romer, F.</creatorcontrib><creatorcontrib>Ataro, E.O.</creatorcontrib><creatorcontrib>Daleiden, J.</creatorcontrib><creatorcontrib>Irmer, S.</creatorcontrib><creatorcontrib>Tarraf, A.</creatorcontrib><creatorcontrib>Hillmer, H.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Ceramic Abstracts</collection><collection>Materials Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE journal of selected topics in quantum electronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Prott, C.</au><au>Romer, F.</au><au>Ataro, E.O.</au><au>Daleiden, J.</au><au>Irmer, S.</au><au>Tarraf, A.</au><au>Hillmer, H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs</atitle><jtitle>IEEE journal of selected topics in quantum electronics</jtitle><stitle>JSTQE</stitle><date>2003-05-01</date><risdate>2003</risdate><volume>9</volume><issue>3</issue><spage>918</spage><epage>928</epage><pages>918-928</pages><issn>1077-260X</issn><eissn>1558-4542</eissn><coden>IJSQEN</coden><abstract>Tunable vertical cavity devices including an air-gap integrated in the cavity have been designed, fabricated, and investigated. The ultrawide wavelength tuning is realized by micromechanical actuation of Bragg mirror membranes. Based on optical and mechanical model calculations, the air-gap filters and vertical cavity surface emitting lasers (VCSELs) are designed for investigating mainly the optical tuning efficiency. In our research, we focus on two different mirror material systems, dielectric Si/sub 3/N/sub 4//SiO/sub 2/ and InP/air-gap Bragg mirrors and on two tuning concepts, respectively. For the dielectric mirrors, continuous tuning is achieved by thermal actuation of the Si/sub 3/N/sub 4//SiO/sub 2/ mirror membranes, and for InP/air-gap mirrors, electrostatic actuation of the InP membranes is used. To verify the optical and mechanical simulations, InP/air-gap filters are characterized by measuring reflectance spectra and the tuning behavior. The measured results agree with the simulations used to optimize the micromechanical and optical characteristics of air-gap filters and VCSELs for optical communication applications.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JSTQE.2003.818848</doi><tpages>11</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1077-260X |
| ispartof | IEEE journal of selected topics in quantum electronics, 2003-05, Vol.9 (3), p.918-928 |
| issn | 1077-260X 1558-4542 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_901673651 |
| source | IEEE Electronic Library (IEL) |
| subjects | Actuation Air gaps Biomembranes Dielectrics Holes Indium phosphide Indium phosphides Laser tuning Membranes Micromechanical devices Mirrors Optical filters Optical tuning Optical wireless Silicon nitride Simulation Technological change Tunable circuits and devices Tuning Vertical cavity surface emitting lasers |
| title | Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-26T17%3A24%3A27IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Modeling%20of%20ultrawidely%20tunable%20vertical%20cavity%20air-gap%20filters%20and%20VCSELs&rft.jtitle=IEEE%20journal%20of%20selected%20topics%20in%20quantum%20electronics&rft.au=Prott,%20C.&rft.date=2003-05-01&rft.volume=9&rft.issue=3&rft.spage=918&rft.epage=928&rft.pages=918-928&rft.issn=1077-260X&rft.eissn=1558-4542&rft.coden=IJSQEN&rft_id=info:doi/10.1109/JSTQE.2003.818848&rft_dat=%3Cproquest_RIE%3E901673651%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=922964019&rft_id=info:pmid/&rft_ieee_id=1250494&rfr_iscdi=true |