Fabrication of Hierarchical Pillar Arrays from Thermoplastic and Photosensitive SU-8

By exploiting the thermoplastic and photosensitive nature of SU‐8 photoresists, different types of hierarchical pillar arrays with variable aspect ratios are fabricated through capillary force lithography (CFL), followed by photopatterning. The thermoplastic nature of SU‐8 enables the imprinting of...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Small (Weinheim an der Bergstrasse, Germany) Germany), 2010-03, Vol.6 (6), p.768-775
Hauptverfasser:	Zhang, Ying, Lin, Chia-Tai, Yang, Shu
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays Aspect ratio capillary force lithography Crosslinking Dimethylpolysiloxanes - chemistry Epoxy Compounds - chemistry hierarchical pillar arrays Light Lithography Microscopy, Electron, Scanning Microscopy, Electron, Transmission Molecular Imprinting - methods Phenols - chemistry Photoresists Pillars Plastics - chemistry SU-8 Temperature thermal reflow Thermoplastic resins Tuning
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!