Low-Actuation-Voltage MEMS for 2-D Optical Switches
This paper discusses the design, fabrication, and test results of electromagnetically actuated two-dimensional (2-D) microelectromechanical systems (MEMS) optical switches. The switching element consists of a 20 mumtimes500 mumtimes1200 mum vertical micromirror, which is monolithically integrated wi...
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| Veröffentlicht in: | Journal of lightwave technology 2006-11, Vol.24 (11), p.4372-4379 |
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| creator | Hsin-Ta Hsieh Chen-Wei Chiu Tsao, T. Fukang Jiang Su, G.-D.J. |
| description | This paper discusses the design, fabrication, and test results of electromagnetically actuated two-dimensional (2-D) microelectromechanical systems (MEMS) optical switches. The switching element consists of a 20 mumtimes500 mumtimes1200 mum vertical micromirror, which is monolithically integrated with an actuation flap. The micromirror is made by anisotropic tetramethyl-ammonium-hydroxide wet etching with an optical insertion loss of about 0.2 dB. A maximum insertion loss of 2.1 dB has been experimentally demonstrated for a 10 times 10 2-D optical crossconnect switch. The actuation flap has double layers of spiral metal coils to generate a large actuation force with the permanent magnets placed at the bottom of the MEMS chip. The magnetic flux is created on the surface of a pair of opposite polarized magnets to precisely control the moving direction of the vertical mirror. The required voltage is less than 0.5 V, and the power consumption is about 3.5 mW for a switching element. Due to the center symmetric design and the stress-free characteristic of the micromirror, the temperature dependence loss is demonstrated to be as low as 0.05 dB. A switching time of 5 ms is achieved by applying the proper driving waveform |
| doi_str_mv | 10.1109/JLT.2006.883674 |
| format | Article |
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The switching element consists of a 20 mumtimes500 mumtimes1200 mum vertical micromirror, which is monolithically integrated with an actuation flap. The micromirror is made by anisotropic tetramethyl-ammonium-hydroxide wet etching with an optical insertion loss of about 0.2 dB. A maximum insertion loss of 2.1 dB has been experimentally demonstrated for a 10 times 10 2-D optical crossconnect switch. The actuation flap has double layers of spiral metal coils to generate a large actuation force with the permanent magnets placed at the bottom of the MEMS chip. The magnetic flux is created on the surface of a pair of opposite polarized magnets to precisely control the moving direction of the vertical mirror. The required voltage is less than 0.5 V, and the power consumption is about 3.5 mW for a switching element. Due to the center symmetric design and the stress-free characteristic of the micromirror, the temperature dependence loss is demonstrated to be as low as 0.05 dB. A switching time of 5 ms is achieved by applying the proper driving waveform</description><identifier>ISSN: 0733-8724</identifier><identifier>EISSN: 1558-2213</identifier><identifier>DOI: 10.1109/JLT.2006.883674</identifier><identifier>CODEN: JLTEDG</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Actuation ; Applied sciences ; Circuit properties ; Design engineering ; Electric, optical and optoelectronic circuits ; Electromagnetic force ; Electronics ; Exact sciences and technology ; Flaps ; free space ; Geometrical optics ; Insertion loss ; Integrated optics. Optical fibers and wave guides ; low voltage ; Micro- and nanoelectromechanical devices (mems/nems) ; Microelectromechanical systems ; Micromechanical devices ; Micromirrors ; Miscellaneous ; Noise levels ; Optical and optoelectronic circuits ; optical crossconnect (OXC) switches ; Optical design ; Optical device fabrication ; Optical losses ; optical microelectromechanical systems (MEMS) ; Optical switches ; Optical switching ; R&D ; Research & development ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Switching ; Switching and signalling ; System testing ; Systems, networks and services of telecommunications ; Telecommunications ; Telecommunications and information theory ; Two dimensional displays ; vertical micromirrors</subject><ispartof>Journal of lightwave technology, 2006-11, Vol.24 (11), p.4372-4379</ispartof><rights>2006 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2006</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3394-57d1846005abdd3bf5a7126c0e2efe309bd39f30286395f1081bb1c287f9cab3</citedby><cites>FETCH-LOGICAL-c3394-57d1846005abdd3bf5a7126c0e2efe309bd39f30286395f1081bb1c287f9cab3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4012198$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4012198$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18294759$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Hsin-Ta Hsieh</creatorcontrib><creatorcontrib>Chen-Wei Chiu</creatorcontrib><creatorcontrib>Tsao, T.</creatorcontrib><creatorcontrib>Fukang Jiang</creatorcontrib><creatorcontrib>Su, G.-D.J.</creatorcontrib><title>Low-Actuation-Voltage MEMS for 2-D Optical Switches</title><title>Journal of lightwave technology</title><addtitle>JLT</addtitle><description>This paper discusses the design, fabrication, and test results of electromagnetically actuated two-dimensional (2-D) microelectromechanical systems (MEMS) optical switches. The switching element consists of a 20 mumtimes500 mumtimes1200 mum vertical micromirror, which is monolithically integrated with an actuation flap. The micromirror is made by anisotropic tetramethyl-ammonium-hydroxide wet etching with an optical insertion loss of about 0.2 dB. A maximum insertion loss of 2.1 dB has been experimentally demonstrated for a 10 times 10 2-D optical crossconnect switch. The actuation flap has double layers of spiral metal coils to generate a large actuation force with the permanent magnets placed at the bottom of the MEMS chip. The magnetic flux is created on the surface of a pair of opposite polarized magnets to precisely control the moving direction of the vertical mirror. The required voltage is less than 0.5 V, and the power consumption is about 3.5 mW for a switching element. Due to the center symmetric design and the stress-free characteristic of the micromirror, the temperature dependence loss is demonstrated to be as low as 0.05 dB. A switching time of 5 ms is achieved by applying the proper driving waveform</description><subject>Actuation</subject><subject>Applied sciences</subject><subject>Circuit properties</subject><subject>Design engineering</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electromagnetic force</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Flaps</subject><subject>free space</subject><subject>Geometrical optics</subject><subject>Insertion loss</subject><subject>Integrated optics. Optical fibers and wave guides</subject><subject>low voltage</subject><subject>Micro- and nanoelectromechanical devices (mems/nems)</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Micromirrors</subject><subject>Miscellaneous</subject><subject>Noise levels</subject><subject>Optical and optoelectronic circuits</subject><subject>optical crossconnect (OXC) switches</subject><subject>Optical design</subject><subject>Optical device fabrication</subject><subject>Optical losses</subject><subject>optical microelectromechanical systems (MEMS)</subject><subject>Optical switches</subject><subject>Optical switching</subject><subject>R&D</subject><subject>Research & development</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Switching</subject><subject>Switching and signalling</subject><subject>System testing</subject><subject>Systems, networks and services of telecommunications</subject><subject>Telecommunications</subject><subject>Telecommunications and information theory</subject><subject>Two dimensional displays</subject><subject>vertical micromirrors</subject><issn>0733-8724</issn><issn>1558-2213</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kD1PwzAQhi0EEqUwM7BESAiWtD7bie0RlfKlVB1asUaOY0OqtCl2oop_j6tUIDEw3XDP--ruQegS8AgAy_FrthwRjNOREDTl7AgNIElETAjQYzTAnNJYcMJO0Zn3K4yBMcEHiGbNLr7XbafaqtnEb03dqncTzaazRWQbF5H4IZpv20qrOlrsqlZ_GH-OTqyqvbk4zCFaPk6Xk-c4mz-9TO6zWFMqWZzwEgRLMU5UUZa0sIniQFKNDTHWUCyLkkpLMREplYkFLKAoQBPBrdSqoEN029duXfPZGd_m68prU9dqY5rO50KmhDHgEMi7f0nAhAgpU4kDev0HXTWd24Q3cpHubwUgARr3kHaN987YfOuqtXJfoSnfy86D7HwvO-9lh8TNoVb5oMo6tdGV_40JIhlPZOCueq4yxvysGQYCUtBvqzGDsA</recordid><startdate>200611</startdate><enddate>200611</enddate><creator>Hsin-Ta Hsieh</creator><creator>Chen-Wei Chiu</creator><creator>Tsao, T.</creator><creator>Fukang Jiang</creator><creator>Su, G.-D.J.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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Optical fibers and wave guides</topic><topic>low voltage</topic><topic>Micro- and nanoelectromechanical devices (mems/nems)</topic><topic>Microelectromechanical systems</topic><topic>Micromechanical devices</topic><topic>Micromirrors</topic><topic>Miscellaneous</topic><topic>Noise levels</topic><topic>Optical and optoelectronic circuits</topic><topic>optical crossconnect (OXC) switches</topic><topic>Optical design</topic><topic>Optical device fabrication</topic><topic>Optical losses</topic><topic>optical microelectromechanical systems (MEMS)</topic><topic>Optical switches</topic><topic>Optical switching</topic><topic>R&D</topic><topic>Research & development</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Switching</topic><topic>Switching and signalling</topic><topic>System testing</topic><topic>Systems, networks and services of telecommunications</topic><topic>Telecommunications</topic><topic>Telecommunications and information theory</topic><topic>Two dimensional displays</topic><topic>vertical micromirrors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hsin-Ta Hsieh</creatorcontrib><creatorcontrib>Chen-Wei Chiu</creatorcontrib><creatorcontrib>Tsao, T.</creatorcontrib><creatorcontrib>Fukang Jiang</creatorcontrib><creatorcontrib>Su, G.-D.J.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of lightwave technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Hsin-Ta Hsieh</au><au>Chen-Wei Chiu</au><au>Tsao, T.</au><au>Fukang Jiang</au><au>Su, G.-D.J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Low-Actuation-Voltage MEMS for 2-D Optical Switches</atitle><jtitle>Journal of lightwave technology</jtitle><stitle>JLT</stitle><date>2006-11</date><risdate>2006</risdate><volume>24</volume><issue>11</issue><spage>4372</spage><epage>4379</epage><pages>4372-4379</pages><issn>0733-8724</issn><eissn>1558-2213</eissn><coden>JLTEDG</coden><abstract>This paper discusses the design, fabrication, and test results of electromagnetically actuated two-dimensional (2-D) microelectromechanical systems (MEMS) optical switches. The switching element consists of a 20 mumtimes500 mumtimes1200 mum vertical micromirror, which is monolithically integrated with an actuation flap. The micromirror is made by anisotropic tetramethyl-ammonium-hydroxide wet etching with an optical insertion loss of about 0.2 dB. A maximum insertion loss of 2.1 dB has been experimentally demonstrated for a 10 times 10 2-D optical crossconnect switch. The actuation flap has double layers of spiral metal coils to generate a large actuation force with the permanent magnets placed at the bottom of the MEMS chip. The magnetic flux is created on the surface of a pair of opposite polarized magnets to precisely control the moving direction of the vertical mirror. The required voltage is less than 0.5 V, and the power consumption is about 3.5 mW for a switching element. Due to the center symmetric design and the stress-free characteristic of the micromirror, the temperature dependence loss is demonstrated to be as low as 0.05 dB. A switching time of 5 ms is achieved by applying the proper driving waveform</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JLT.2006.883674</doi><tpages>8</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | Actuation Applied sciences Circuit properties Design engineering Electric, optical and optoelectronic circuits Electromagnetic force Electronics Exact sciences and technology Flaps free space Geometrical optics Insertion loss Integrated optics. Optical fibers and wave guides low voltage Micro- and nanoelectromechanical devices (mems/nems) Microelectromechanical systems Micromechanical devices Micromirrors Miscellaneous Noise levels Optical and optoelectronic circuits optical crossconnect (OXC) switches Optical design Optical device fabrication Optical losses optical microelectromechanical systems (MEMS) Optical switches Optical switching R&D Research & development Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Switching Switching and signalling System testing Systems, networks and services of telecommunications Telecommunications Telecommunications and information theory Two dimensional displays vertical micromirrors |
| title | Low-Actuation-Voltage MEMS for 2-D Optical Switches |
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