10-nm channel length pentacene transistors

Organic thin-film transitors (OTFTs) were fabricated with channel lengths as small as 10 nm and an operating voltage of V/sub DD/=-0.3 V using e-beam lithography. For sub-200-nm channel lengths, scaling L downwards resulted in increased on-current, decreased I/sub on//I/sub off/ ratio, V/sub T/-roll...

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Veröffentlicht in:IEEE transactions on electron devices 2005-08, Vol.52 (8), p.1874-1879
Hauptverfasser: Lee, J.B., Chang, P.C., Liddle, J.A., Subramanian, V.
Format: Artikel
Sprache:eng
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Zusammenfassung:Organic thin-film transitors (OTFTs) were fabricated with channel lengths as small as 10 nm and an operating voltage of V/sub DD/=-0.3 V using e-beam lithography. For sub-200-nm channel lengths, scaling L downwards resulted in increased on-current, decreased I/sub on//I/sub off/ ratio, V/sub T/-rolloff, and drain-induced barrier lowering. These trends are correlated with device topology, electrostatics, and thin-film morphology. Nanoscale OTFT are interesting both as a means of studying intrinsic electrical properties of organic materials and as a possible route toward increasing on-current in organic devices. This paper sheds light on many of the issues encountered when shrinking organic devices, providing insight into approaches for optimizing nanoscaled OTFT.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2005.851845