Fourier transform infrared spectroscopy investigation of chemical bonding in low-k a-SiC:H thin films

Fourier Transform Infrared (FTIR) Spectroscopy has long been utilized as an analytical technique for qualitatively determining the presence of various different chemical bonds in gasses, liquids, solids, and on surfaces. Most recently, FTIR has been proven to be extremely useful for understanding th...

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Veröffentlicht in:	Journal of non-crystalline solids 2011-07, Vol.357 (15), p.2970-2983
Hauptverfasser:	King, S.W., French, M., Bielefeld, J., Lanford, W.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Bonding Chemical vapor deposition Condensed matter: structure, mechanical and thermal properties Copper Density Dielectric constant Disordered solids Exact sciences and technology FTIR Glasses Lattice dynamics Low-k Nanostructure Networks Phenyls Physics Plasma Silicon carbide Structure and morphology thickness Structure of solids and liquids crystallography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Terminals Thin film structure and morphology Thin films Vibrational states in disordered systems
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