The neon gas field ion source—a first characterization of neon nanomachining properties

At the Charged Particle Optics Conference (CPO7) in 2006, a novel trimer based helium gas field ion source (GFIS) was introduced for use in a new helium ion microscope (HIM), demonstrating the novel source performance attributes and unique imaging applications of the HIM (Hill et al., 2008 [1]; Live...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2011-07, Vol.645 (1), p.136-140
Hauptverfasser:	Livengood, Richard H., Tan, Shida, Hallstein, Roy, Notte, John, McVey, Shawn, Faridur Rahman, F.H.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Charged particles Circuit edit FIB Focused ion beam GFIS Ground fault interruptions Helium Helium ion microscope HIM Ion sources Nano-fabrication Nanocomposites Nanomachining Nanomaterials Nanostructure Neon
Online-Zugang:	Volltext
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