Chirality assignment to carbon nanotubes integrated in MEMS by tilted-view transmission electron microscopy

Front side etching combined with sample tilting – instead of wafer through etching – allows for transmission electron microscopy (TEM) investigations on nanostructures integrated in microelectromechanical systems (MEMS). We present electron diffraction of an individual single-walled carbon nanotube...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2011-06, Vol.154 (2), p.155-159
Hauptverfasser:	Muoth, M., Gramm, F., Asaka, K., Durrer, L., Helbling, T., Roman, C., Lee, S.-W., Hierold, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon nanotube Chirality Electron diffraction Etching Focal plane Integration MEMS Microelectromechanical systems Nanostructure Single wall carbon nanotubes TEM Tips Wafers
Online-Zugang:	Volltext
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