Nanoembossing Induced Ferroelectric Lithography on PZT Films for Silver Particle Patterning
The concept of growing nanosize particles on polarized ferroelectric domain areas is known as ferroelectric lithography (FL). Here, a further step of technical development was achieved by combining nanoembossing technique with the FL to realize the selective growth of silver on the polarized areas i...
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| Veröffentlicht in: | ACS nano 2011-09, Vol.5 (9), p.6855-6860 |
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| creator | Shen, Zhenkui Qu, Xinping Chen, Yifang Liu, Ran |
| description | The concept of growing nanosize particles on polarized ferroelectric domain areas is known as ferroelectric lithography (FL). Here, a further step of technical development was achieved by combining nanoembossing technique with the FL to realize the selective growth of silver on the polarized areas induced by nanoembossing. The induced rearrangements of domain distributions by embossing in the ferroelectric films have been characterized by piezoresponse force microscopy (PFM). The selective photochemical reduction of silver particles on the embossed nanostructures associated with the underlying domain patterns created by the nanoembossing process has been successfully demonstrated. This nanoembossing induced ferroelectric lithography (NIFL) developed in this work is expected to create an alternative route for nanoscale patterning of metals. |
| doi_str_mv | 10.1021/nn202932z |
| format | Article |
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This nanoembossing induced ferroelectric lithography (NIFL) developed in this work is expected to create an alternative route for nanoscale patterning of metals.</description><subject>Embossing</subject><subject>Ferroelectric materials</subject><subject>Ferroelectricity</subject><subject>Lithography</subject><subject>Microscopy</subject><subject>Nanostructure</subject><subject>Patterning</subject><subject>Photochemical</subject><subject>Silver</subject><issn>1936-0851</issn><issn>1936-086X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNp9kE1LxDAQQIMofqwe_AOSi6iH1Xw1yR5FXF1YVFBB9FDSdKqVNlmTVtBfb3TXPYmnGYY37_AQ2qXkmBJGT5xjhI04-1xBm3TE5ZBo-bC63DO6gbZifCUkU1rJdbTBqOaaCb2Jnq6M89AWPsbaPeOJK3sLJR5DCB4asF2oLZ7W3Yt_Dmb28oG9wzePd3hcN23ElQ_4tm7eIeAbE7raNpCWroPgkm0brVWmibCzmAN0Pz6_O7scTq8vJmen06HhQnVDwXWlCTW2gkxVpeBZoUacy6ykpRK8LKSQVBnNtCyASGCUpptKT5JRxi0foIO5dxb8Ww-xy9s6Wmga48D3MdcjoelPoQE6_JekSrIUSXCR0KM5akNqE6DKZ6FuTfjIKcm_q-fL6ondW2j7ooVySf5mTsD-HDA25q--Dy71-EP0Ba7TiFc</recordid><startdate>20110927</startdate><enddate>20110927</enddate><creator>Shen, Zhenkui</creator><creator>Qu, Xinping</creator><creator>Chen, Yifang</creator><creator>Liu, Ran</creator><general>American Chemical Society</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><scope>7X8</scope></search><sort><creationdate>20110927</creationdate><title>Nanoembossing Induced Ferroelectric Lithography on PZT Films for Silver Particle Patterning</title><author>Shen, Zhenkui ; Qu, Xinping ; Chen, Yifang ; Liu, Ran</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-a347t-438f801acfe57fd435b793365d1d743db64617a8286be06e211db678f862123c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Embossing</topic><topic>Ferroelectric materials</topic><topic>Ferroelectricity</topic><topic>Lithography</topic><topic>Microscopy</topic><topic>Nanostructure</topic><topic>Patterning</topic><topic>Photochemical</topic><topic>Silver</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shen, Zhenkui</creatorcontrib><creatorcontrib>Qu, Xinping</creatorcontrib><creatorcontrib>Chen, Yifang</creatorcontrib><creatorcontrib>Liu, Ran</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>ACS nano</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shen, Zhenkui</au><au>Qu, Xinping</au><au>Chen, Yifang</au><au>Liu, Ran</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Nanoembossing Induced Ferroelectric Lithography on PZT Films for Silver Particle Patterning</atitle><jtitle>ACS nano</jtitle><addtitle>ACS Nano</addtitle><date>2011-09-27</date><risdate>2011</risdate><volume>5</volume><issue>9</issue><spage>6855</spage><epage>6860</epage><pages>6855-6860</pages><issn>1936-0851</issn><eissn>1936-086X</eissn><abstract>The concept of growing nanosize particles on polarized ferroelectric domain areas is known as ferroelectric lithography (FL). 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| subjects | Embossing Ferroelectric materials Ferroelectricity Lithography Microscopy Nanostructure Patterning Photochemical Silver |
| title | Nanoembossing Induced Ferroelectric Lithography on PZT Films for Silver Particle Patterning |
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