Parametrically Amplified Z-Axis Lorentz Force Magnetometer

This paper describes a microelectromechanical systems (MEMS) Lorentz force navigation magnetometer whose fabrication is fully compatible with existing foundry processes used to manufacture MEMS inertial sensors. Operating at 1 atm, the magnetometer is shown to have a Brownian-noise-limited field res...

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Veröffentlicht in:	Journal of microelectromechanical systems 2011-06, Vol.20 (3), p.702-710
Hauptverfasser:	Thompson, M J, Horsley, D A
Format:	Artikel
Sprache:	eng
Schlagworte:	Amplification Angular resolution Compatibility Devices Electronics Exact sciences and technology Force Force measurement Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Lorentz covariance Lorentz force Magnetic components, instruments and techniques Magnetic sensors Magnetometers Magnetometers for magnetic field measurements Measurement and testing methods Mechanical instruments, equipment and techniques microelectromechanical devices Microelectromechanical systems Micromechanical devices Micromechanical devices and systems Navigation Noise parametric amplifiers Physics Solid mechanics Structural and continuum mechanics
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