Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection

There is a great need in experimental biology for tools to study interactions between biological molecules and to profile expression levels of large numbers of proteins. This paper describes the fabrication, packaging and testing of a resonant mass sensor for the detection of biomolecules in a micro...

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Veröffentlicht in:	Journal of microelectromechanical systems 2006-12, Vol.15 (6), p.1466-1476
Hauptverfasser:	Burg, T.P., Mirza, A.R., Milovic, N., Tsau, C.H., Popescu, G.A., Foster, J.S., Manalis, S.R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Biomedical transducers Biomolecules Biosensors Channels chemical transducers Densitometers density measurement Exact sciences and technology Fabrication Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Liquids mass sensor Mechanical engineering. Machine design Mechanical instruments, equipment and techniques microbalance Microchannel Microchannels Micromechanical devices and systems Molecular biophysics Molecules Packaging Physics Precision engineering, watch making Proteins Q factor Quality factor Resonance Resonators Sensor phenomena and characterization Sensors Silicon nitride Testing vacuum packaging
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