Analysis of multilayered thin-film piezoelectric transducer arrays

We study coupled extensional and flexural vibrations of a 1-D array of partially electroded, multilayered piezoelectric transducers. The classical theory for laminated plates is used. A theoretical solution is obtained. Based on the solution, basic vibration characteristics of resonant frequencies,...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2009-11, Vol.56 (11), p.2571-2577
Hauptverfasser: Li, Hui, Du, Hualong, Xu, Limei, Hu, Yuantai, Fan, Hui, Yang, Jiashi
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container_issue 11
container_start_page 2571
container_title IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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creator Li, Hui
Du, Hualong
Xu, Limei
Hu, Yuantai
Fan, Hui
Yang, Jiashi
description We study coupled extensional and flexural vibrations of a 1-D array of partially electroded, multilayered piezoelectric transducers. The classical theory for laminated plates is used. A theoretical solution is obtained. Based on the solution, basic vibration characteristics of resonant frequencies, mode shapes, and admittance are calculated. Their dependence on geometric parameters is examined. The present analysis represents a significant progress of existing analyses on a single cell of a transducer array.
doi_str_mv 10.1109/TUFFC.2009.1345
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subjects Acoustics
Acoustics - instrumentation
Aerospace engineering
Arrays
Capacitive sensors
Civil engineering
Computer-Aided Design
Equations
Equipment Design
Equipment Failure Analysis
Exact sciences and technology
Fatigue (materials)
Ferroelectric materials
Fundamental areas of phenomenology (including applications)
Mathematical analysis
Membranes, Artificial
Micro-Electrical-Mechanical Systems - instrumentation
Physics
Piezoelectric films
Piezoelectric transducers
Reproducibility of Results
Resonant frequencies
Sensitivity and Specificity
Solid mechanics
Space technology
Structural and continuum mechanics
Tensile stress
Thin films
Transducers
Transduction
acoustical devices for the generation and reproduction of sound
Vibration
Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)
title Analysis of multilayered thin-film piezoelectric transducer arrays
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