Influence of Argon and Nitrogen Admixture in HMDSO/O2 Plasmas onto Powder Formation

In situ Fourier transform infrared spectroscopy was used to study the powder formation of hexamethyldisiloxane/O2 plasmas. The spectra show that oxygen plays an important role at the beginning of the process. A large amount of oxygen is responsible for intense powder formation. The admixture of iner...

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Veröffentlicht in:	Plasma processes and polymers 2011-02, Vol.8 (2), p.108-117
Hauptverfasser:	Ricci, Marina, Dorier, Jean-Luc, Hollenstein, Christoph, Fayet, Pierre
Format:	Artikel
Sprache:	eng
Schlagworte:	Admixtures Applied sciences Evolution Exact sciences and technology Fourier transforms FTIR spectroscopy HMDSO Inert Infrared spectroscopy Monomers OES PECVD Physicochemistry of polymers Plasmas Polymerization Polymers and radiations powder Spectra
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