High-accuracy thickness measurement of a transparent plate with the heterodyne central fringe identification technique

In a modified Twyman-Green interferometer, the optical path variation is measured with the heterodyne central fringe identification technique, as the light beam is focused by a displaced microscopic objective on the front/rear surface of the test transparent plate. The optical path length variation...

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Veröffentlicht in:	Applied Optics 2011-07, Vol.50 (21), p.4011-4016
Hauptverfasser:	Wu, Wang-Tsung, Hsieh, Hung-Chih, Chang, Wei-Yao, Chen, Yen-Liang, Su, Der-Chin
Format:	Artikel
Sprache:	eng
Schlagworte:	ACCURACY BEAMS CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS INTERFEROMETERS PLATES SURFACES THICKNESS
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