Fabrication-tolerant 1310 nm laterally coupled distributed feedback lasers with high side mode suppression ratios

► 1310 nm laterally coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. ► LC-DFB lasers, unlike conventional DFB lasers, do not require a regrowth step during the fabrication process. ► The lateral grating of the LC-DFB lasers can be patterned along bot...

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Veröffentlicht in:Photonics and nanostructures 2011-04, Vol.9 (2), p.111-118
Hauptverfasser: Millett, R., Dridi, K., Benhsaien, A., Schriemer, H., Hinzer, K., Hall, T.
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container_end_page 118
container_issue 2
container_start_page 111
container_title Photonics and nanostructures
container_volume 9
creator Millett, R.
Dridi, K.
Benhsaien, A.
Schriemer, H.
Hinzer, K.
Hall, T.
description ► 1310 nm laterally coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. ► LC-DFB lasers, unlike conventional DFB lasers, do not require a regrowth step during the fabrication process. ► The lateral grating of the LC-DFB lasers can be patterned along both sidewalls of the ridge waveguide. ► Gratings with higher order can enhance the lithographic tolerance for lower resolution patterning, yielding lasers more amenable to mass-manufacturing. ► Excellent side mode suppression ratio over 53 dB has been measured with a single mode lasing around 1310 nm. 1310 nm laterally coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. LC-DFB lasers, unlike conventional DFB lasers, do not require a regrowth step during the fabrication process. The lateral grating of the LC-DFB lasers can be patterned along both sidewalls of the ridge waveguide. Gratings with higher order can enhance the lithographic tolerance for lower resolution patterning, yielding lasers more amenable to mass-manufacturing. Excellent side mode suppression ratio over 53 dB has been measured with a single mode lasing around 1310 nm.
doi_str_mv 10.1016/j.photonics.2011.01.003
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subjects Distributed feedback lasers
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Lasers
Lasing
Lithography
Nanocomposites
Nanomaterials
Nanostructure
Noise levels
Optical elements, devices, and systems
Optical waveguides and coupleurs
Optics
Physics
Side mode suppression ratio
Stepper lithography
Third-order gratings
Tolerances
title Fabrication-tolerant 1310 nm laterally coupled distributed feedback lasers with high side mode suppression ratios
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