Automatic Microassembly Using Visual Servo Control

We propose an automatic microassembly method that can be used to construct three-dimensional microelectromechanical system (MEMS) structures. A six degree-of-freedom micromanipulator, equipped with a passive microgripper, is employed to grasp, manipulate, and join the micropart using visual feedback...

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Veröffentlicht in:	IEEE transactions on electronics packaging manufacturing 2008-10, Vol.31 (4), p.316-325
Hauptverfasser:	Lidai Wang, Mills, J.K., Cleghorn, W.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Contact Control theory Degrees of freedom Electronics Exact sciences and technology Feedback Grippers Imaging devices Mathematical analysis Micro- and nanoelectromechanical devices (mems/nems) Microassembly Microelectromechanical devices Microelectromechanical systems microelectromechanical systems (MEMS) Micromanipulators Micromechanical devices Optical feedback Optical microscopy Optical sensors Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Servosystems Tasks vision-based contact sensor Visual visual servo control
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