Polymeric Waveguide Film With Embedded Mirror for Multilayer Optical Circuits

A polymeric waveguide film with embedded mirrors is presented for a multilayer optical circuit. For the polymeric waveguide fabrication, arrayed waveguide patterns were directly formed on a metallic master body using ultra-precision machining (UPM) method, and 45deg-angled mirrors as beam reflector were constructed at the master pattern ends. We have achieved excellent surface roughness of the pattern and mirror facet using UPM. The waveguide lines and 45deg-angled mirrors were simultaneously fabricated on an under-clad sheet using an imprint method with a mirror-integrated master. We manufactured polymer waveguide films with embedded beam reflectors and consequently measured the optical characteristics of waveguides.