Synthesis of AlaCraOaN thin films in corundum and f.c.c. structure by reactive r.f. magnetron sputtering

Advanced PVD coatings for metal cutting applications must exhibit a multifunctional property profile including high hardness, chemical inertness and high temperature stability. Recently, ternary AlaCraO thin films with mechanical properties similar or superior to conventional aluminium oxide thin fi...

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Veröffentlicht in:	Thin solid films 2011-04, Vol.519 (12)
Hauptverfasser:	Stueber, M, Diechle, D, Leiste, H, Ulrich, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Coatings Combinatorial analysis Deposition Hardness Magnetron sputtering Physical vapor deposition Synthesis Thin films
Online-Zugang:	Volltext
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