Multichannel Quartz Crystal Microbalance

Arrays of quartz crystal resonators are fabricated on a single quartz wafer as a multichannel quartz crystal microbalance (MQCM). Three types of four-channel array of 10-MHz resonators are prepared and tested. Mechanical oscillation of each channel is entrapped within the channel almost completely,...

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Veröffentlicht in:	Analytical chemistry (Washington) 1999-09, Vol.71 (17), p.3632-3636
Hauptverfasser:	Tatsuma, Tetsu, Watanabe, Yoshihito, Oyama, Noboru, Kitakizaki, Kaoru, Haba, Masanori
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Chemistry Crystals Exact sciences and technology General, instrumentation Instruments Quartz
Online-Zugang:	Volltext
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