Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source

This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green’s function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of...

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Veröffentlicht in:	International journal of solids and structures 2011-05, Vol.48 (10), p.1466-1473
Hauptverfasser:	Griffin, Benjamin A., Chandrasekaran, Venkataraman, Williams, Matthew D., Sankar, Bhavani V., Sheplak, Mark
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Analytical and numerical techniques Axisymmetric Computational efficiency Exact sciences and technology Fundamental areas of phenomenology (including applications) General equipment and techniques Harmonics Heat conduction Heat sources Heat transfer Instruments, apparatus, components and techniques common to several branches of physics and astronomy Low frequencies Mathematical analysis Mathematical models MEMS Physics Plate Proximity sensor Solid mechanics Static elasticity (thermoelasticity...) Structural and continuum mechanics Thermoelastic Transducers Wave equations
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