Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source

This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green’s function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of...

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Veröffentlicht in:International journal of solids and structures 2011-05, Vol.48 (10), p.1466-1473
Hauptverfasser: Griffin, Benjamin A., Chandrasekaran, Venkataraman, Williams, Matthew D., Sankar, Bhavani V., Sheplak, Mark
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container_end_page 1473
container_issue 10
container_start_page 1466
container_title International journal of solids and structures
container_volume 48
creator Griffin, Benjamin A.
Chandrasekaran, Venkataraman
Williams, Matthew D.
Sankar, Bhavani V.
Sheplak, Mark
description This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green’s function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of the thermoelastically forced bending wave equation. Model results of a representative thermoelastic structure include transient temperature and sinusoidal steady state transverse displacement. Comparison with finite element analysis shows excellent agreement with favorable computational costs. Model constraints at low frequencies are identified and discussed. The computational efficiency of the analytical model makes it a more viable modeling method for design optimization.
doi_str_mv 10.1016/j.ijsolstr.2011.01.029
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fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_869833750</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0020768311000461</els_id><sourcerecordid>869833750</sourcerecordid><originalsourceid>FETCH-LOGICAL-c422t-655f23d90c85740f68f04b59606709a5115502489127fe23c14ddaeb10f5f7733</originalsourceid><addsrcrecordid>eNqFkE-LFDEQxYMoOK5-BclFPPVsJel0d27K4p-FFS96DrXpCpMh3RmT9OJ-ezPM6lV4UAX1q1fUY-ytgL0AMVwf9-FYUiw17yUIsYcmaZ6xnZhG00nRD8_ZDkBCNw6TeslelXIEgF4Z2LH8Lc0UuU-Z1wPlJVHEUoPj6OqGNaSVJ89x5fg7lMdloZrbMJRUczq1zoXstoiZnyJW4g8Bz3BYK-UVIz9gs1wbdyCsvKQtO3rNXniMhd481Sv28_OnHzdfu7vvX25vPt51rpeydoPWXqrZgJv02IMfJg_9vTYDDCMY1EJoDbKfjJCjJ6mc6OcZ6V6A134clbpi7y--p5x-bVSqXUJxFCOulLZip8FMSo0aGjlcSJdTKZm8PeWwYH60Auw5Y3u0fzO254wtNEnTFt89ncDiMPqMqwvl37bsQSijz9yHC0ft34dA2RYXaHU0h0yu2jmF_536A6hOl00</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>869833750</pqid></control><display><type>article</type><title>Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source</title><source>Elsevier ScienceDirect Journals Complete</source><source>EZB-FREE-00999 freely available EZB journals</source><creator>Griffin, Benjamin A. ; Chandrasekaran, Venkataraman ; Williams, Matthew D. ; Sankar, Bhavani V. ; Sheplak, Mark</creator><creatorcontrib>Griffin, Benjamin A. ; Chandrasekaran, Venkataraman ; Williams, Matthew D. ; Sankar, Bhavani V. ; Sheplak, Mark</creatorcontrib><description>This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green’s function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of the thermoelastically forced bending wave equation. Model results of a representative thermoelastic structure include transient temperature and sinusoidal steady state transverse displacement. Comparison with finite element analysis shows excellent agreement with favorable computational costs. Model constraints at low frequencies are identified and discussed. The computational efficiency of the analytical model makes it a more viable modeling method for design optimization.</description><identifier>ISSN: 0020-7683</identifier><identifier>EISSN: 1879-2146</identifier><identifier>DOI: 10.1016/j.ijsolstr.2011.01.029</identifier><identifier>CODEN: IJSOAD</identifier><language>eng</language><publisher>Kidlington: Elsevier Ltd</publisher><subject>Actuation ; Analytical and numerical techniques ; Axisymmetric ; Computational efficiency ; Exact sciences and technology ; Fundamental areas of phenomenology (including applications) ; General equipment and techniques ; Harmonics ; Heat conduction ; Heat sources ; Heat transfer ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Low frequencies ; Mathematical analysis ; Mathematical models ; MEMS ; Physics ; Plate ; Proximity sensor ; Solid mechanics ; Static elasticity (thermoelasticity...) ; Structural and continuum mechanics ; Thermoelastic ; Transducers ; Wave equations</subject><ispartof>International journal of solids and structures, 2011-05, Vol.48 (10), p.1466-1473</ispartof><rights>2011 Elsevier Ltd</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c422t-655f23d90c85740f68f04b59606709a5115502489127fe23c14ddaeb10f5f7733</citedby><cites>FETCH-LOGICAL-c422t-655f23d90c85740f68f04b59606709a5115502489127fe23c14ddaeb10f5f7733</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.ijsolstr.2011.01.029$$EHTML$$P50$$Gelsevier$$Hfree_for_read</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=24013959$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Griffin, Benjamin A.</creatorcontrib><creatorcontrib>Chandrasekaran, Venkataraman</creatorcontrib><creatorcontrib>Williams, Matthew D.</creatorcontrib><creatorcontrib>Sankar, Bhavani V.</creatorcontrib><creatorcontrib>Sheplak, Mark</creatorcontrib><title>Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source</title><title>International journal of solids and structures</title><description>This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green’s function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of the thermoelastically forced bending wave equation. Model results of a representative thermoelastic structure include transient temperature and sinusoidal steady state transverse displacement. Comparison with finite element analysis shows excellent agreement with favorable computational costs. Model constraints at low frequencies are identified and discussed. The computational efficiency of the analytical model makes it a more viable modeling method for design optimization.</description><subject>Actuation</subject><subject>Analytical and numerical techniques</subject><subject>Axisymmetric</subject><subject>Computational efficiency</subject><subject>Exact sciences and technology</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>General equipment and techniques</subject><subject>Harmonics</subject><subject>Heat conduction</subject><subject>Heat sources</subject><subject>Heat transfer</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Low frequencies</subject><subject>Mathematical analysis</subject><subject>Mathematical models</subject><subject>MEMS</subject><subject>Physics</subject><subject>Plate</subject><subject>Proximity sensor</subject><subject>Solid mechanics</subject><subject>Static elasticity (thermoelasticity...)</subject><subject>Structural and continuum mechanics</subject><subject>Thermoelastic</subject><subject>Transducers</subject><subject>Wave equations</subject><issn>0020-7683</issn><issn>1879-2146</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNqFkE-LFDEQxYMoOK5-BclFPPVsJel0d27K4p-FFS96DrXpCpMh3RmT9OJ-ezPM6lV4UAX1q1fUY-ytgL0AMVwf9-FYUiw17yUIsYcmaZ6xnZhG00nRD8_ZDkBCNw6TeslelXIEgF4Z2LH8Lc0UuU-Z1wPlJVHEUoPj6OqGNaSVJ89x5fg7lMdloZrbMJRUczq1zoXstoiZnyJW4g8Bz3BYK-UVIz9gs1wbdyCsvKQtO3rNXniMhd481Sv28_OnHzdfu7vvX25vPt51rpeydoPWXqrZgJv02IMfJg_9vTYDDCMY1EJoDbKfjJCjJ6mc6OcZ6V6A134clbpi7y--p5x-bVSqXUJxFCOulLZip8FMSo0aGjlcSJdTKZm8PeWwYH60Auw5Y3u0fzO254wtNEnTFt89ncDiMPqMqwvl37bsQSijz9yHC0ft34dA2RYXaHU0h0yu2jmF_536A6hOl00</recordid><startdate>20110515</startdate><enddate>20110515</enddate><creator>Griffin, Benjamin A.</creator><creator>Chandrasekaran, Venkataraman</creator><creator>Williams, Matthew D.</creator><creator>Sankar, Bhavani V.</creator><creator>Sheplak, Mark</creator><general>Elsevier Ltd</general><general>Elsevier</general><scope>6I.</scope><scope>AAFTH</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7TB</scope><scope>8BQ</scope><scope>8FD</scope><scope>FR3</scope><scope>JG9</scope><scope>KR7</scope></search><sort><creationdate>20110515</creationdate><title>Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source</title><author>Griffin, Benjamin A. ; Chandrasekaran, Venkataraman ; Williams, Matthew D. ; Sankar, Bhavani V. ; Sheplak, Mark</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c422t-655f23d90c85740f68f04b59606709a5115502489127fe23c14ddaeb10f5f7733</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Actuation</topic><topic>Analytical and numerical techniques</topic><topic>Axisymmetric</topic><topic>Computational efficiency</topic><topic>Exact sciences and technology</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>General equipment and techniques</topic><topic>Harmonics</topic><topic>Heat conduction</topic><topic>Heat sources</topic><topic>Heat transfer</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Low frequencies</topic><topic>Mathematical analysis</topic><topic>Mathematical models</topic><topic>MEMS</topic><topic>Physics</topic><topic>Plate</topic><topic>Proximity sensor</topic><topic>Solid mechanics</topic><topic>Static elasticity (thermoelasticity...)</topic><topic>Structural and continuum mechanics</topic><topic>Thermoelastic</topic><topic>Transducers</topic><topic>Wave equations</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Griffin, Benjamin A.</creatorcontrib><creatorcontrib>Chandrasekaran, Venkataraman</creatorcontrib><creatorcontrib>Williams, Matthew D.</creatorcontrib><creatorcontrib>Sankar, Bhavani V.</creatorcontrib><creatorcontrib>Sheplak, Mark</creatorcontrib><collection>ScienceDirect Open Access Titles</collection><collection>Elsevier:ScienceDirect:Open Access</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Mechanical &amp; Transportation Engineering Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Materials Research Database</collection><collection>Civil Engineering Abstracts</collection><jtitle>International journal of solids and structures</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Griffin, Benjamin A.</au><au>Chandrasekaran, Venkataraman</au><au>Williams, Matthew D.</au><au>Sankar, Bhavani V.</au><au>Sheplak, Mark</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source</atitle><jtitle>International journal of solids and structures</jtitle><date>2011-05-15</date><risdate>2011</risdate><volume>48</volume><issue>10</issue><spage>1466</spage><epage>1473</epage><pages>1466-1473</pages><issn>0020-7683</issn><eissn>1879-2146</eissn><coden>IJSOAD</coden><abstract>This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green’s function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of the thermoelastically forced bending wave equation. Model results of a representative thermoelastic structure include transient temperature and sinusoidal steady state transverse displacement. Comparison with finite element analysis shows excellent agreement with favorable computational costs. Model constraints at low frequencies are identified and discussed. The computational efficiency of the analytical model makes it a more viable modeling method for design optimization.</abstract><cop>Kidlington</cop><pub>Elsevier Ltd</pub><doi>10.1016/j.ijsolstr.2011.01.029</doi><tpages>8</tpages><oa>free_for_read</oa></addata></record>
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source Elsevier ScienceDirect Journals Complete; EZB-FREE-00999 freely available EZB journals
subjects Actuation
Analytical and numerical techniques
Axisymmetric
Computational efficiency
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
General equipment and techniques
Harmonics
Heat conduction
Heat sources
Heat transfer
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Low frequencies
Mathematical analysis
Mathematical models
MEMS
Physics
Plate
Proximity sensor
Solid mechanics
Static elasticity (thermoelasticity...)
Structural and continuum mechanics
Thermoelastic
Transducers
Wave equations
title Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-05T08%3A27%3A46IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Model%20for%20thermoelastic%20actuation%20of%20an%20axisymmetric%20isotropic%20circular%20plate%20via%20an%20internal%20harmonic%20heat%20source&rft.jtitle=International%20journal%20of%20solids%20and%20structures&rft.au=Griffin,%20Benjamin%20A.&rft.date=2011-05-15&rft.volume=48&rft.issue=10&rft.spage=1466&rft.epage=1473&rft.pages=1466-1473&rft.issn=0020-7683&rft.eissn=1879-2146&rft.coden=IJSOAD&rft_id=info:doi/10.1016/j.ijsolstr.2011.01.029&rft_dat=%3Cproquest_cross%3E869833750%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=869833750&rft_id=info:pmid/&rft_els_id=S0020768311000461&rfr_iscdi=true