Piezoelectric cantilever sensors with asymmetric anchor exhibit picogram sensitivity in liquids

We show for the first time that self-exciting and self-sensing piezoelectric cantilevers consisting only of lead zirconate titanate (PZT) measure resonance only if they are asymmetrically anchored. Symmetric-anchoring did not give rise to electrically measurable bending resonant modes in the 0–100 k...

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2011-03, Vol.153 (1), p.64-70
Hauptverfasser: Sharma, Harsh, Lakshmanan, Ramji S., Johnson, Blake N., Mutharasan, Raj
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container_title Sensors and actuators. B, Chemical
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creator Sharma, Harsh
Lakshmanan, Ramji S.
Johnson, Blake N.
Mutharasan, Raj
description We show for the first time that self-exciting and self-sensing piezoelectric cantilevers consisting only of lead zirconate titanate (PZT) measure resonance only if they are asymmetrically anchored. Symmetric-anchoring did not give rise to electrically measurable bending resonant modes in the 0–100 kHz range. Sensitivity of first and second bending mode resonances was characterized in a flow apparatus using small density changes in liquid (0.003–0.01 g/cm 3) and by dodecanethiol chemisorption at 30 pM. Density change results were consistent with existing models of submerged cantilevers, and yielded mass-change sensitivity of ∼33 ng/Hz and 217 pg/Hz for the first two modes. In chemisorption experiments, where binding was localized to 1 mm 2 distal tip of the PZT cantilever, sensitivity improved by an order of magnitude to 2 pg/Hz and 414 fg/Hz for the same two resonant modes.
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subjects Actuators
Asymmetry
Bending
Biosensor
Chemisorption
Density
In-liquid
lead
Lead zirconate titanates
Liquids
Mass-change sensitivity
Piezoelectricity
Resonant frequency
Sensors
sensors (equipment)
title Piezoelectric cantilever sensors with asymmetric anchor exhibit picogram sensitivity in liquids
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