2 Degree-of-Freedom Spiral Micromirror Manipulator: Fabrication and Spatial Mechanical Assembling

We present a process for the fabrication and assembly of a novel spiral-shaped micromirror manipulator for free space optical switching. The manipulator is comprised of two different parts, which are fabricated using conventional surface micromachining processes. The footprint of the assembled devic...

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Veröffentlicht in:	Journal of Advanced Mechanical Design, Systems, and Manufacturing Systems, and Manufacturing, 2008, Vol.2(2), pp.265-270
Hauptverfasser:	SADAT, Seid Hossein, KAMIYA, Daiki, BAGHERI, Saeed, HORIE, Mikio
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Assembling Assembly Design engineering Devices Electrostatic Actuator Manipulators MEMS Micromachining Optical Switch Pyramids Spatial Mechanical Assembling Spiral Shaped Beam Spirals Zipping Effect
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