2 Degree-of-Freedom Spiral Micromirror Manipulator: Fabrication and Spatial Mechanical Assembling
We present a process for the fabrication and assembly of a novel spiral-shaped micromirror manipulator for free space optical switching. The manipulator is comprised of two different parts, which are fabricated using conventional surface micromachining processes. The footprint of the assembled devic...
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| Veröffentlicht in: | Journal of Advanced Mechanical Design, Systems, and Manufacturing Systems, and Manufacturing, 2008, Vol.2(2), pp.265-270 |
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| container_title | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
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| creator | SADAT, Seid Hossein KAMIYA, Daiki BAGHERI, Saeed HORIE, Mikio |
| description | We present a process for the fabrication and assembly of a novel spiral-shaped micromirror manipulator for free space optical switching. The manipulator is comprised of two different parts, which are fabricated using conventional surface micromachining processes. The footprint of the assembled device is about 600μm and the height of the micro pyramid is 200μm. In spite of conventional approaches to microsystem design, which prefer devices with monolithic and self-assembling properties, the two parts are fabricated on two different chips. They are then assembled using a spatial mechanical approach. A number of separate spiral and pyramid parts are fabricated and the first assembling test on a single actuator is performed. In this paper, the Surface micromachining processes used for fabrication of the parts are presented and their sensitivity and issues are discussed. Spatial mechanical assembly results are presented and process issues are addressed. |
| doi_str_mv | 10.1299/jamdsm.2.265 |
| format | Article |
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The manipulator is comprised of two different parts, which are fabricated using conventional surface micromachining processes. The footprint of the assembled device is about 600μm and the height of the micro pyramid is 200μm. In spite of conventional approaches to microsystem design, which prefer devices with monolithic and self-assembling properties, the two parts are fabricated on two different chips. They are then assembled using a spatial mechanical approach. A number of separate spiral and pyramid parts are fabricated and the first assembling test on a single actuator is performed. In this paper, the Surface micromachining processes used for fabrication of the parts are presented and their sensitivity and issues are discussed. Spatial mechanical assembly results are presented and process issues are addressed.</description><identifier>ISSN: 1881-3054</identifier><identifier>EISSN: 1881-3054</identifier><identifier>DOI: 10.1299/jamdsm.2.265</identifier><language>eng</language><publisher>The Japan Society of Mechanical Engineers</publisher><subject>Actuators ; Assembling ; Assembly ; Design engineering ; Devices ; Electrostatic Actuator ; Manipulators ; MEMS ; Micromachining ; Optical Switch ; Pyramids ; Spatial Mechanical Assembling ; Spiral Shaped Beam ; Spirals ; Zipping Effect</subject><ispartof>Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2008, Vol.2(2), pp.265-270</ispartof><rights>2008 by The Japan Society of Mechanical Engineers</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c358t-2af2fdefa43a2eaebc89f729b421a234db4fb25c92bb84452ca2e012760819953</citedby><cites>FETCH-LOGICAL-c358t-2af2fdefa43a2eaebc89f729b421a234db4fb25c92bb84452ca2e012760819953</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,1883,4024,27923,27924,27925</link.rule.ids></links><search><creatorcontrib>SADAT, Seid Hossein</creatorcontrib><creatorcontrib>KAMIYA, Daiki</creatorcontrib><creatorcontrib>BAGHERI, Saeed</creatorcontrib><creatorcontrib>HORIE, Mikio</creatorcontrib><title>2 Degree-of-Freedom Spiral Micromirror Manipulator: Fabrication and Spatial Mechanical Assembling</title><title>Journal of Advanced Mechanical Design, Systems, and Manufacturing</title><addtitle>JAMDSM</addtitle><description>We present a process for the fabrication and assembly of a novel spiral-shaped micromirror manipulator for free space optical switching. 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Spatial mechanical assembly results are presented and process issues are addressed.</description><subject>Actuators</subject><subject>Assembling</subject><subject>Assembly</subject><subject>Design engineering</subject><subject>Devices</subject><subject>Electrostatic Actuator</subject><subject>Manipulators</subject><subject>MEMS</subject><subject>Micromachining</subject><subject>Optical Switch</subject><subject>Pyramids</subject><subject>Spatial Mechanical Assembling</subject><subject>Spiral Shaped Beam</subject><subject>Spirals</subject><subject>Zipping Effect</subject><issn>1881-3054</issn><issn>1881-3054</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNpN0MFOwzAMBuAIgcQY3HiA3rjQkbhJltxAgwHSJg7AOXLTZGRq15J0B96eoqJp8sGW_MmyfkKuGZ0x0Ppui02VmhnMQIoTMmFKsbyggp8ezefkIqUtpVJTziYEIHt0m-hc3vp8OfSqbbL3LkSss3WwsW1CjG3M1rgL3b7Gvo2X5MxjndzVf5-Sz-XTx-IlX709vy4eVrkthOpzQA--ch55geDQlVZpPwddcmAIBa9K7ksQVkNZKs4F2IFRBnNJFdNaFFNyM97tYvu9d6k3TUjW1TXuXLtPRkk911JJOsjbUQ7_phSdN10MDcYfw6j5S8aMyRgwQzIDvx_5NvW4cQeMsQ-2dkd4LCkOK_uF0bhd8QsScW8F</recordid><startdate>2008</startdate><enddate>2008</enddate><creator>SADAT, Seid Hossein</creator><creator>KAMIYA, Daiki</creator><creator>BAGHERI, Saeed</creator><creator>HORIE, Mikio</creator><general>The Japan Society of Mechanical Engineers</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7TB</scope><scope>8FD</scope><scope>FR3</scope></search><sort><creationdate>2008</creationdate><title>2 Degree-of-Freedom Spiral Micromirror Manipulator</title><author>SADAT, Seid Hossein ; KAMIYA, Daiki ; BAGHERI, Saeed ; HORIE, Mikio</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c358t-2af2fdefa43a2eaebc89f729b421a234db4fb25c92bb84452ca2e012760819953</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Actuators</topic><topic>Assembling</topic><topic>Assembly</topic><topic>Design engineering</topic><topic>Devices</topic><topic>Electrostatic Actuator</topic><topic>Manipulators</topic><topic>MEMS</topic><topic>Micromachining</topic><topic>Optical Switch</topic><topic>Pyramids</topic><topic>Spatial Mechanical Assembling</topic><topic>Spiral Shaped Beam</topic><topic>Spirals</topic><topic>Zipping Effect</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>SADAT, Seid Hossein</creatorcontrib><creatorcontrib>KAMIYA, Daiki</creatorcontrib><creatorcontrib>BAGHERI, Saeed</creatorcontrib><creatorcontrib>HORIE, Mikio</creatorcontrib><collection>CrossRef</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><jtitle>Journal of Advanced Mechanical Design, Systems, and Manufacturing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>SADAT, Seid Hossein</au><au>KAMIYA, Daiki</au><au>BAGHERI, Saeed</au><au>HORIE, Mikio</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>2 Degree-of-Freedom Spiral Micromirror Manipulator: Fabrication and Spatial Mechanical Assembling</atitle><jtitle>Journal of Advanced Mechanical Design, Systems, and Manufacturing</jtitle><addtitle>JAMDSM</addtitle><date>2008</date><risdate>2008</risdate><volume>2</volume><issue>2</issue><spage>265</spage><epage>270</epage><pages>265-270</pages><issn>1881-3054</issn><eissn>1881-3054</eissn><abstract>We present a process for the fabrication and assembly of a novel spiral-shaped micromirror manipulator for free space optical switching. 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| ispartof | Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2008, Vol.2(2), pp.265-270 |
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| language | eng |
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| source | J-STAGE日本語サイト (Free Access); EZB Electronic Journals Library |
| subjects | Actuators Assembling Assembly Design engineering Devices Electrostatic Actuator Manipulators MEMS Micromachining Optical Switch Pyramids Spatial Mechanical Assembling Spiral Shaped Beam Spirals Zipping Effect |
| title | 2 Degree-of-Freedom Spiral Micromirror Manipulator: Fabrication and Spatial Mechanical Assembling |
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