High-speed measurement of three-dimensional surface profiles up to 10 μm using two-wavelength phase-shifting interferometry utilizing an injection locking technique

High-speed two-wavelength phase-shifting interferometry is presented. The technique is aimed at high-speed in-line inspection of spacers in liquid crystal display panels or wafer bumps where the measuring range is well determined and high-speed measurements are essential. With our test setup, the me...

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Veröffentlicht in:	Applied Optics 2011-04, Vol.50 (11), p.1541-1547
Hauptverfasser:	Jang, Roma, Kang, Chu-Shik, Kim, Jong-Ahn, Kim, Jae Wan, Kim, Jae-Eun, Park, Hae Yong
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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