Positive-Working Photosensitive Alkaline-Developable Polyimide Precursor Based on Semi-Alicyclic Poly(amide acid), Vinyl Ether Crosslinker, and a Photoacid Generator

A positive-working photosensitive polyimide based on semi-alicyclic poly(amide acid) (PAA), 1,1,1-tris(4-[2-(vinyloxy)ethoxy]phenyl)ethane (TVPE) as a crosslinking dissolution inhibitor and a photoacid generator has been developed. PAA was prepared from pyromellitic dianhydride and alicyclic diamine...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of Photopolymer Science and Technology 2006, Vol.19(2), pp.277-280
Hauptverfasser:	Okazaki, Masaki, Onishi, Hitoshi, Yamashita, Wataru, Tamai, Shoji
Format:	Artikel
Sprache:	eng
Schlagworte:	chemical amplification Crosslinking Generators Inhibitors Polyimide resins Polymerization positive-working Precursors semi-alicyclic poly(amide acid) Sodium carbonate
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!