Analysis of polymer flow in embossing stage during thermal nanoimprint lithography

Viscous polymer flow in embossing stage during thermal nanoimprint lithography was investigated. Flow behavior of the thermoplastic polymer was analyzed numerically and experimentally. Fixed grid scheme along with the finite element method was used for numerical analysis. Effects of process paramete...

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Veröffentlicht in:	Polymer engineering and science 2011-02, Vol.51 (2), p.209-217
Hauptverfasser:	Kim, S.M., Kang, J.H., Lee, W.I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Applied sciences Embossing Embossing (Typography) Exact sciences and technology Finite element method Fluidity Holes Lithography Machinery and processing Materials Mathematical models Miscellaneous Nanocomposites Nanomaterials Nanostructure Numerical analysis Plastics Polymer industry, paints, wood Polymers Production processes Properties Technology of polymers Viscosity Viscous flow
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