Initial growth of intrinsic microcrystalline silicon thin film: Dependence on pre-hydrogen glow discharge and substrate surface morphology

[Display omitted] ▶ Pre-hydrogen glow discharge decreases amorphous incubation volume. ▶ Pre-hydrogen glow discharge increases the nuclei density. ▶ Substrate surface morphology affects the formation of crystalline. We found the decreases of amorphous incubation volume from Raman spectra and surface...

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Veröffentlicht in:	Applied surface science 2011-01, Vol.257 (7), p.3014-3019
Hauptverfasser:	Zhang, Xiaodan, Zheng, Xinxia, Wang, Guanghong, Zhao, Ying
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Crystal structure Crystallinity Density Exact sciences and technology Glow discharges Morphology Nucleation Physics Pre-hydrogen glow discharge Substrate surface morphology Surface roughness Thin films
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