Measurement of nanomovements of an object from the optical phase image

We examine a method for measuring small movements of an object, based on calculation of the displacement of the image obtained using an optical interferometer. We estimate the effect of phase noise in reconstruction of the coherent structure of the field on the accuracy in measuring the movements. W...

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Veröffentlicht in:	Measurement techniques 2010-11, Vol.53 (7), p.782-788
Hauptverfasser:	Levin, G. G., Ilyushin, Ya. A., Minaev, V. L., Moiseev, N. N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Accuracy Algorithms Analytical Chemistry Approximation Characterization and Evaluation of Materials Displacement Estimates Mathematical analysis Measurement Science and Instrumentation Measurement techniques Microelectromechanical systems Microscopes Microscopy Movements Nanocomposites Nanomaterials Nanoscience Nanostructure Optics Physical Chemistry Physics Physics and Astronomy Signal to noise ratio Studies
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