Aspect-ratio and lateral-resolution enhancement in force microscopy by attaching nanoclusters generated by an ion cluster source at the end of a silicon tip

One of the factors that limit the spatial resolution in atomic force microscopy (AFM) is the physical size of the probe. This limitation is particularly severe when the imaged structures are comparable in size to the tip's apex. The resolution in the AFM is usually enhanced by using sharp tips...

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Veröffentlicht in:	Review of scientific instruments 2011-02, Vol.82 (2), p.023710-023710-7
Hauptverfasser:	Martínez, L., Tello, M., Díaz, M., Román, E., Garcia, R., Huttel, Y.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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