Height gauge based on dual polarization competition laser

Based on dual polarization competition laser, we develop a new height gauge. By inserting a quartz crystal plate into the laser cavity, one laser beam splits into two orthogonally linear polarized laser beams, which appear one after another with the change in cavity length. After detecting their int...

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Veröffentlicht in:Optics and lasers in engineering 2011-03, Vol.49 (3), p.445-450
Hauptverfasser: Zhao, Zhengqi, Zhang, Shulian, Li, Yan
Format: Artikel
Sprache:eng
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Zusammenfassung:Based on dual polarization competition laser, we develop a new height gauge. By inserting a quartz crystal plate into the laser cavity, one laser beam splits into two orthogonally linear polarized laser beams, which appear one after another with the change in cavity length. After detecting their intensities, we obtain two power-turning curves. The longitudinal mode spacing is divided into 4 equal zones and each one has different intensity phenomena, which provides a new method of height measurement. According to experiments, the direct measuring range of this new method is 12 mm with resolution of 79.1 nm, and the indirect measuring range can be increased using first grade gauge blocks and a liftable platform. Compared to other height gauges such as vernier gauge, inductance sensor and gauge block interferometer, this new instrument has the advantage of self-calibration and simple structure without frequency stabilization system. ► The height gauge is based on dual polarization competition laser. ► The phenomena of frequency splitting and intensity turning curves are utilized. ► The advantage is self-calibration without frequency stabilization system.
ISSN:0143-8166
1873-0302
DOI:10.1016/j.optlaseng.2010.11.016