A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving

A single-crystal silicon-based lateral-axis tuning-fork gyroscope (TFG) with electrostatic force-balanced (EFB) driving and torsional z-sensing is presented. The EFB comb drive used in this TFG can efficiently suppress the mechanical coupling in a simple manner. The TFG structure is also optimized t...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2010-02, Vol.20 (2), p.025007-025007
Hauptverfasser:	Guo, Z Y, Yang, Z C, Zhao, Q C, Lin, L T, Ding, H T, Liu, X S, Cui, J, Xie, H, Yan, G Z
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Coriolis force Devices Driving Electronics Electrostatics Exact sciences and technology Gyroscopes Instruments, apparatus, components and techniques common to several branches of physics and astronomy Joining Measurements common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Metrology, measurements and laboratory procedures Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Micromechanics Noise levels Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Velocity, acceleration and rotation
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