Local and CMOS-compatible synthesis of CuO nanowires on a suspended microheater on a silicon substrate
This paper presents the synthesis of CuO nanowires using a localized thermal heating method in ambient air. It employs local heat sources defined in micro-resistive heaters fabricated by a standard polysilicon-based surface micromachining process instead of a global furnace heating. Since the synthe...
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| Veröffentlicht in: | Nanotechnology 2010-06, Vol.21 (23), p.235602-235602 |
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| container_issue | 23 |
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| container_title | Nanotechnology |
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| creator | Zhang, Kaili Yang, Yang Pun, E Y B Shen, Ruiqi |
| description | This paper presents the synthesis of CuO nanowires using a localized thermal heating method in ambient air. It employs local heat sources defined in micro-resistive heaters fabricated by a standard polysilicon-based surface micromachining process instead of a global furnace heating. Since the synthesis is performed globally at room temperature, the presented process is compatible with standard CMOS. The synthesized CuO nanowires are characterized by scanning electron microscopy, transmission electron microscopy and high resolution transmission electron microscopy. It is found that this approach provides a simple method to locally synthesize suspended CuO nanowires on polysilicon microbridges on silicon substrates, thus allowing for integration of CuO nanowires into silicon-based devices. It provides a significant step towards the process integration of CuO nanowires with MEMS to realize functional devices. |
| doi_str_mv | 10.1088/0957-4484/21/23/235602 |
| format | Article |
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It employs local heat sources defined in micro-resistive heaters fabricated by a standard polysilicon-based surface micromachining process instead of a global furnace heating. Since the synthesis is performed globally at room temperature, the presented process is compatible with standard CMOS. The synthesized CuO nanowires are characterized by scanning electron microscopy, transmission electron microscopy and high resolution transmission electron microscopy. It is found that this approach provides a simple method to locally synthesize suspended CuO nanowires on polysilicon microbridges on silicon substrates, thus allowing for integration of CuO nanowires into silicon-based devices. It provides a significant step towards the process integration of CuO nanowires with MEMS to realize functional devices.</description><subject>COPPER OXIDE</subject><subject>Devices</subject><subject>ELECTRONIC PRODUCTS</subject><subject>FABRICATION</subject><subject>HEATING</subject><subject>MICRO ORGANISMS</subject><subject>MICROMACHINING</subject><subject>Microorganisms</subject><subject>MICROWIRE</subject><subject>Nanowires</subject><subject>SCANNING ELECTRON MICROSCOPY</subject><subject>SEMICONDUCTORS</subject><subject>Silicon substrates</subject><subject>Synthesis</subject><issn>0957-4484</issn><issn>1361-6528</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNqNkUtLAzEUhYMotlb_QsnO1di8JskspfiCShfqOmSSOzQyLyczSP-9U1q7UVAIJNx851zuuQjNKbmhROsFyVKVCKHFgtEF4-NJJWEnaEq5pIlMmT5F0yM0QRcxvhNCqWb0HE0YEZJzraaoWDXOltjWHi-f1y-Ja6rW9iEvAcdt3W8ghoibAi-HNa5t3XyGDsZCjS2OQ2yh9uBxFVzXbMD20B2-Qhnc-IpDHvturF-is8KWEa4O9wy93d-9Lh-T1frhaXm7SpxgrE8o8VYRJ7wmSjhLfGYZV5JkUqtCWJmB8nkKXEOuCS2KNPc0p1oxznMuHPAZut77tl3zMUDsTRWig7K0NTRDNDpNZSZSJv4kFeecaa13pNyT45AxdlCYtguV7baGErNbhtnlbHY5G0YN42a_jFE4P7QY8gr8Ufad_gjQPRCa9v-myU_N76xpfcG_AAtmoQY</recordid><startdate>20100611</startdate><enddate>20100611</enddate><creator>Zhang, Kaili</creator><creator>Yang, Yang</creator><creator>Pun, E Y B</creator><creator>Shen, Ruiqi</creator><general>IOP Publishing</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>H8G</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20100611</creationdate><title>Local and CMOS-compatible synthesis of CuO nanowires on a suspended microheater on a silicon substrate</title><author>Zhang, Kaili ; Yang, Yang ; Pun, E Y B ; Shen, Ruiqi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c422t-10da70c4d8074ca0d9a237609687f4a69e7db5e38eb801ff5bd1b187233b34ce3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>COPPER OXIDE</topic><topic>Devices</topic><topic>ELECTRONIC PRODUCTS</topic><topic>FABRICATION</topic><topic>HEATING</topic><topic>MICRO ORGANISMS</topic><topic>MICROMACHINING</topic><topic>Microorganisms</topic><topic>MICROWIRE</topic><topic>Nanowires</topic><topic>SCANNING ELECTRON MICROSCOPY</topic><topic>SEMICONDUCTORS</topic><topic>Silicon substrates</topic><topic>Synthesis</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zhang, Kaili</creatorcontrib><creatorcontrib>Yang, Yang</creatorcontrib><creatorcontrib>Pun, E Y B</creatorcontrib><creatorcontrib>Shen, Ruiqi</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Copper Technical Reference Library</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Nanotechnology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zhang, Kaili</au><au>Yang, Yang</au><au>Pun, E Y B</au><au>Shen, Ruiqi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Local and CMOS-compatible synthesis of CuO nanowires on a suspended microheater on a silicon substrate</atitle><jtitle>Nanotechnology</jtitle><addtitle>Nanotechnology</addtitle><date>2010-06-11</date><risdate>2010</risdate><volume>21</volume><issue>23</issue><spage>235602</spage><epage>235602</epage><pages>235602-235602</pages><issn>0957-4484</issn><eissn>1361-6528</eissn><abstract>This paper presents the synthesis of CuO nanowires using a localized thermal heating method in ambient air. 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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | COPPER OXIDE Devices ELECTRONIC PRODUCTS FABRICATION HEATING MICRO ORGANISMS MICROMACHINING Microorganisms MICROWIRE Nanowires SCANNING ELECTRON MICROSCOPY SEMICONDUCTORS Silicon substrates Synthesis |
| title | Local and CMOS-compatible synthesis of CuO nanowires on a suspended microheater on a silicon substrate |
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