Raman spectroscopy investigations of TiB x C y N z coatings deposited by low pressure chemical vapor deposition

TiB x C y N z coatings have been prepared applying LPCVD and characterized using SEM/EDX, XRD, and Raman micro-spectroscopy. It has been shown that first-order, defect-induced Raman spectra of good quality can be obtained from TiB x C y N z coatings, even if buried within a multilayer stack. The Ram...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Surface & coatings technology 2010-11, Vol.205 (5), p.1339-1344
Hauptverfasser:	Dreiling, Ines, Stiens, Dirk, Chassé, Thomas
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Chemical vapor deposition (CVD) Coatings Correlation Deposition Hard coatings Microscopy Multilayers Nonlinearity Phonons Raman spectroscopy Spatial resolution Titanium boron carbonitride (TiBCN) Titanium carbonitride (TiCN) XRD
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!