X-ray photoelectron spectroscopy for analysis of plasma–polymer interactions in Ar plasmas sustained via RF inductive coupling with low-inductance antenna units

Plasma–polymer interactions have been investigated on the basis of hard X-ray photoelectron spectroscopy (HXPES) together with conventional X-ray photoelectron spectroscopy (XPS) for analysis of chemical bonding states in the surface nano-layers of polymethylmethacrylate (PMMA) films, which were exp...

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Veröffentlicht in:	Thin solid films 2010-04, Vol.518 (13), p.3555-3560
Hauptverfasser:	Setsuhara, Yuichi, Cho, Ken, Shiratani, Masaharu, Sekine, Makoto, Hori, Masaru, Ikenaga, Eiji, Zaima, Shigeaki
Format:	Artikel
Sprache:	eng
Schlagworte:	Antennas Ar plasma Argon plasma Condensed matter: structure, mechanical and thermal properties Discharges for spectral sources (including inductively coupled plasmas) Electric discharges Exact sciences and technology Hard X-ray photoelectron spectroscopy Inductively-coupled plasma Low-damage process Low-inductance antenna Nanostructure Photoelectron spectroscopy Physical radiation effects, radiation damage Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasmas Plasma–polymer interactions PMMA Polymethyl methacrylates Structure of solids and liquids crystallography X-ray photoelectron spectroscopy X-rays XPS
Online-Zugang:	Volltext
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