A two directional electrostatic comb-drive X– Y micro-stage for MOEMS applications

We report the design, fabrication and characterization of a newly developed electrostatic silicon X– Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices. The micro-stage consists of four electrostatic comb-drive actuators driving a suspended movable platf...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2010-09, Vol.163 (1), p.255-265
Hauptverfasser:	Laszczyk, Karolina, Bargiel, Sylwester, Gorecki, Christophe, Krężel, Jerzy, Dziuban, Piotr, Kujawińska, Małgorzata, Callet, Damien, Frank, Sven
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Comb-drive actuator Devices Displacement DRIE Driving Electrostatics Microlens scanner MOEMS Platforms Raster scanning SOI X– Y micro-stage Yttrium
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