A two directional electrostatic comb-drive X– Y micro-stage for MOEMS applications
We report the design, fabrication and characterization of a newly developed electrostatic silicon X– Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices. The micro-stage consists of four electrostatic comb-drive actuators driving a suspended movable platf...
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| Veröffentlicht in: | Sensors and actuators. A. Physical. 2010-09, Vol.163 (1), p.255-265 |
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| container_title | Sensors and actuators. A. Physical. |
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| creator | Laszczyk, Karolina Bargiel, Sylwester Gorecki, Christophe Krężel, Jerzy Dziuban, Piotr Kujawińska, Małgorzata Callet, Damien Frank, Sven |
| description | We report the design, fabrication and characterization of a newly developed electrostatic silicon
X–
Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices. The micro-stage consists of four electrostatic comb-drive actuators driving a suspended movable platform via a system of straight spring suspensions and converting their deflections into a linear motion. Independent driving of the platform along
X- and
Y-direction has been achieved by employing a “stage-in-the-stage” construction of the movable structure, mechanically linked by suspended insulation bridges.
Experimental characteristics have shown the large static translations of ±28
μm along
X-axis and ±37
μm along
Y-axis, at a driving voltage of 100
V. The resonant frequency at the fundamental mode in the
X-direction (290
Hz) was lower than in the
Y-direction (550
Hz) while the maximum out-of-plane displacement was measured to be 26
nm within the bandwidth of 0–5
kHz. The device was fabricated by double-side DRIE of a silicon-on-insulator (SOI) wafer with 30-μm-thick device layer. The micro-stage is intended to be integrated with micro-optical components (microlens, diffraction grating) and offers an attractive solution to build miniature and low cost 2D raster scanning modules. |
| doi_str_mv | 10.1016/j.sna.2010.06.020 |
| format | Article |
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X–
Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices. The micro-stage consists of four electrostatic comb-drive actuators driving a suspended movable platform via a system of straight spring suspensions and converting their deflections into a linear motion. Independent driving of the platform along
X- and
Y-direction has been achieved by employing a “stage-in-the-stage” construction of the movable structure, mechanically linked by suspended insulation bridges.
Experimental characteristics have shown the large static translations of ±28
μm along
X-axis and ±37
μm along
Y-axis, at a driving voltage of 100
V. The resonant frequency at the fundamental mode in the
X-direction (290
Hz) was lower than in the
Y-direction (550
Hz) while the maximum out-of-plane displacement was measured to be 26
nm within the bandwidth of 0–5
kHz. The device was fabricated by double-side DRIE of a silicon-on-insulator (SOI) wafer with 30-μm-thick device layer. The micro-stage is intended to be integrated with micro-optical components (microlens, diffraction grating) and offers an attractive solution to build miniature and low cost 2D raster scanning modules.</description><identifier>ISSN: 0924-4247</identifier><identifier>EISSN: 1873-3069</identifier><identifier>DOI: 10.1016/j.sna.2010.06.020</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Actuators ; Comb-drive actuator ; Devices ; Displacement ; DRIE ; Driving ; Electrostatics ; Microlens scanner ; MOEMS ; Platforms ; Raster scanning ; SOI ; X– Y micro-stage ; Yttrium</subject><ispartof>Sensors and actuators. A. Physical., 2010-09, Vol.163 (1), p.255-265</ispartof><rights>2010 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c395t-6afb69c2338b06b138b17975bee8b208b12aa4cb1fc76de213f1452ac812246a3</citedby><cites>FETCH-LOGICAL-c395t-6afb69c2338b06b138b17975bee8b208b12aa4cb1fc76de213f1452ac812246a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.sna.2010.06.020$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,777,781,3537,27905,27906,45976</link.rule.ids></links><search><creatorcontrib>Laszczyk, Karolina</creatorcontrib><creatorcontrib>Bargiel, Sylwester</creatorcontrib><creatorcontrib>Gorecki, Christophe</creatorcontrib><creatorcontrib>Krężel, Jerzy</creatorcontrib><creatorcontrib>Dziuban, Piotr</creatorcontrib><creatorcontrib>Kujawińska, Małgorzata</creatorcontrib><creatorcontrib>Callet, Damien</creatorcontrib><creatorcontrib>Frank, Sven</creatorcontrib><title>A two directional electrostatic comb-drive X– Y micro-stage for MOEMS applications</title><title>Sensors and actuators. A. Physical.</title><description>We report the design, fabrication and characterization of a newly developed electrostatic silicon
X–
Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices. The micro-stage consists of four electrostatic comb-drive actuators driving a suspended movable platform via a system of straight spring suspensions and converting their deflections into a linear motion. Independent driving of the platform along
X- and
Y-direction has been achieved by employing a “stage-in-the-stage” construction of the movable structure, mechanically linked by suspended insulation bridges.
Experimental characteristics have shown the large static translations of ±28
μm along
X-axis and ±37
μm along
Y-axis, at a driving voltage of 100
V. The resonant frequency at the fundamental mode in the
X-direction (290
Hz) was lower than in the
Y-direction (550
Hz) while the maximum out-of-plane displacement was measured to be 26
nm within the bandwidth of 0–5
kHz. The device was fabricated by double-side DRIE of a silicon-on-insulator (SOI) wafer with 30-μm-thick device layer. The micro-stage is intended to be integrated with micro-optical components (microlens, diffraction grating) and offers an attractive solution to build miniature and low cost 2D raster scanning modules.</description><subject>Actuators</subject><subject>Comb-drive actuator</subject><subject>Devices</subject><subject>Displacement</subject><subject>DRIE</subject><subject>Driving</subject><subject>Electrostatics</subject><subject>Microlens scanner</subject><subject>MOEMS</subject><subject>Platforms</subject><subject>Raster scanning</subject><subject>SOI</subject><subject>X– Y micro-stage</subject><subject>Yttrium</subject><issn>0924-4247</issn><issn>1873-3069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNp9kE1OwzAQhS0EEqVwAHbesUrwX51ErKqq_EituqBIsLIcZ4JcJXGwUxA77sANOQmuwprVzNPMe5r5ELqkJKWEyutdGjqdMhI1kSlh5AhNaJ7xhBNZHKMJKZhIBBPZKToLYUcI4TzLJmg7x8OHw5X1YAbrOt1gaGLrXRj0YA02ri2Tytt3wM8_X9_4BbfWeJfE8Svg2nm83izXj1j3fWONPmSEc3RS6ybAxV-doqfb5XZxn6w2dw-L-SoxvJgNidR1KQvDOM9LIksaC82KbFYC5CUjUTGthSlpbTJZAaO8pmLGtMkpY0JqPkVXY27v3dsewqBaGww0je7A7YPKRSFyJnISN-m4GU8PwUOtem9b7T8VJeoAUO1UBKgOABWRKgKMnpvRA_GFdwteBWOhMzDCUpWz_7h_Aas0eTo</recordid><startdate>20100901</startdate><enddate>20100901</enddate><creator>Laszczyk, Karolina</creator><creator>Bargiel, Sylwester</creator><creator>Gorecki, Christophe</creator><creator>Krężel, Jerzy</creator><creator>Dziuban, Piotr</creator><creator>Kujawińska, Małgorzata</creator><creator>Callet, Damien</creator><creator>Frank, Sven</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope></search><sort><creationdate>20100901</creationdate><title>A two directional electrostatic comb-drive X– Y micro-stage for MOEMS applications</title><author>Laszczyk, Karolina ; Bargiel, Sylwester ; Gorecki, Christophe ; Krężel, Jerzy ; Dziuban, Piotr ; Kujawińska, Małgorzata ; Callet, Damien ; Frank, Sven</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c395t-6afb69c2338b06b138b17975bee8b208b12aa4cb1fc76de213f1452ac812246a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Actuators</topic><topic>Comb-drive actuator</topic><topic>Devices</topic><topic>Displacement</topic><topic>DRIE</topic><topic>Driving</topic><topic>Electrostatics</topic><topic>Microlens scanner</topic><topic>MOEMS</topic><topic>Platforms</topic><topic>Raster scanning</topic><topic>SOI</topic><topic>X– Y micro-stage</topic><topic>Yttrium</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Laszczyk, Karolina</creatorcontrib><creatorcontrib>Bargiel, Sylwester</creatorcontrib><creatorcontrib>Gorecki, Christophe</creatorcontrib><creatorcontrib>Krężel, Jerzy</creatorcontrib><creatorcontrib>Dziuban, Piotr</creatorcontrib><creatorcontrib>Kujawińska, Małgorzata</creatorcontrib><creatorcontrib>Callet, Damien</creatorcontrib><creatorcontrib>Frank, Sven</creatorcontrib><collection>CrossRef</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Sensors and actuators. A. Physical.</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Laszczyk, Karolina</au><au>Bargiel, Sylwester</au><au>Gorecki, Christophe</au><au>Krężel, Jerzy</au><au>Dziuban, Piotr</au><au>Kujawińska, Małgorzata</au><au>Callet, Damien</au><au>Frank, Sven</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A two directional electrostatic comb-drive X– Y micro-stage for MOEMS applications</atitle><jtitle>Sensors and actuators. A. Physical.</jtitle><date>2010-09-01</date><risdate>2010</risdate><volume>163</volume><issue>1</issue><spage>255</spage><epage>265</epage><pages>255-265</pages><issn>0924-4247</issn><eissn>1873-3069</eissn><abstract>We report the design, fabrication and characterization of a newly developed electrostatic silicon
X–
Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices. The micro-stage consists of four electrostatic comb-drive actuators driving a suspended movable platform via a system of straight spring suspensions and converting their deflections into a linear motion. Independent driving of the platform along
X- and
Y-direction has been achieved by employing a “stage-in-the-stage” construction of the movable structure, mechanically linked by suspended insulation bridges.
Experimental characteristics have shown the large static translations of ±28
μm along
X-axis and ±37
μm along
Y-axis, at a driving voltage of 100
V. The resonant frequency at the fundamental mode in the
X-direction (290
Hz) was lower than in the
Y-direction (550
Hz) while the maximum out-of-plane displacement was measured to be 26
nm within the bandwidth of 0–5
kHz. The device was fabricated by double-side DRIE of a silicon-on-insulator (SOI) wafer with 30-μm-thick device layer. The micro-stage is intended to be integrated with micro-optical components (microlens, diffraction grating) and offers an attractive solution to build miniature and low cost 2D raster scanning modules.</abstract><pub>Elsevier B.V</pub><doi>10.1016/j.sna.2010.06.020</doi><tpages>11</tpages></addata></record> |
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| ispartof | Sensors and actuators. A. Physical., 2010-09, Vol.163 (1), p.255-265 |
| issn | 0924-4247 1873-3069 |
| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Actuators Comb-drive actuator Devices Displacement DRIE Driving Electrostatics Microlens scanner MOEMS Platforms Raster scanning SOI X– Y micro-stage Yttrium |
| title | A two directional electrostatic comb-drive X– Y micro-stage for MOEMS applications |
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