Modeling and Measurement of a Bistable Beam in a Microelectromechanical System

Design and fabrication of microelectromechanical systems (MEMS) can be costly, time consuming, and necessitating accurate models for their behavior. Current theoretical models of bistable beams in MEMS devices are limited to numerical or small deformation models and current measurement techniques ar...

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Veröffentlicht in:	Journal of microelectromechanical systems 2010-12, Vol.19 (6), p.1503-1514
Hauptverfasser:	Brake, M R, Baker, M S, Moore, N W, Crowson, D A, Mitchell, J A, Houston, J E
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical models Beams (structural) Bistable mechanism Boundary conditions Coarsening Deformable models Deformation Devices Euler-Bernoulli beams Exact sciences and technology Force measurement Instruments, apparatus, components and techniques common to several branches of physics and astronomy interfacial force microscopy large deflection modeling Mathematical models Mechanical instruments, equipment and techniques Microelectromechanical systems Microelectronics Micromechanical devices Micromechanical devices and systems Physics Stepped Studies
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