Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime
X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unp...
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| Veröffentlicht in: | Optics express 2011-01, Vol.19 (1), p.175-184 |
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| container_title | Optics express |
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| creator | Vila-Comamala, Joan Gorelick, Sergey Färm, Elina Kewish, Cameron M Diaz, Ana Barrett, Ray Guzenko, Vitaliy A Ritala, Mikko David, Christian |
| description | X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV. |
| doi_str_mv | 10.1364/oe.19.000175 |
| format | Article |
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| identifier | ISSN: 1094-4087 |
| ispartof | Optics express, 2011-01, Vol.19 (1), p.175-184 |
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| language | eng |
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| source | MEDLINE; DOAJ Directory of Open Access Journals; EZB-FREE-00999 freely available EZB journals; Alma/SFX Local Collection |
| subjects | Equipment Design Lenses Microscopy - instrumentation Microscopy - methods Microscopy, Electron, Scanning Transmission - instrumentation Microscopy, Electron, Scanning Transmission - methods Optical Devices Optical Phenomena Scattering, Small Angle X-Ray Diffraction - instrumentation X-Ray Diffraction - methods |
| title | Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime |
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