In-Situ, Real Time Observation of Operating Condition of Multi Emitters in Pulse Mode
We have developed an electron optical instrument for evaluation of multi emitters. The instrument is a versatile emission microscope and is capable of operating as a secondary electron emission microscope (SEEM), a photo electron emission microscope (PEEM) and a field electron emission microscope (F...
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| Veröffentlicht in: | E-journal of surface science and nanotechnology 2010/05/29, Vol.8, pp.266-271 |
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| container_title | E-journal of surface science and nanotechnology |
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| creator | Murata, Hidekazu Sakai, Kentaro Tsubaki, Daisuke Shimoyama, Hiroshi Sakemura, Kazuto Negishi, Nobuyasu Watanabe, Atsushi |
| description | We have developed an electron optical instrument for evaluation of multi emitters. The instrument is a versatile emission microscope and is capable of operating as a secondary electron emission microscope (SEEM), a photo electron emission microscope (PEEM) and a field electron emission microscope (FEEM) imaging modes. The most important feature of the instrument is the capability of simultaneous observation of SEEM and FEEM images as well as PEEM and FEEM images in real time and in-situ mode. The operating condition of the multi emitters can be observed in DC mode as well as pulse mode. Thus, the instrument enables us to obtain quantitative knowledge as to the percentage of actually working emitters out of the whole emitters and to evaluate the stability of the emission current from each individual working emitter. [DOI: 10.1380/ejssnt.2010.266] |
| doi_str_mv | 10.1380/ejssnt.2010.266 |
| format | Article |
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The instrument is a versatile emission microscope and is capable of operating as a secondary electron emission microscope (SEEM), a photo electron emission microscope (PEEM) and a field electron emission microscope (FEEM) imaging modes. The most important feature of the instrument is the capability of simultaneous observation of SEEM and FEEM images as well as PEEM and FEEM images in real time and in-situ mode. The operating condition of the multi emitters can be observed in DC mode as well as pulse mode. Thus, the instrument enables us to obtain quantitative knowledge as to the percentage of actually working emitters out of the whole emitters and to evaluate the stability of the emission current from each individual working emitter. 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Surf. Sci. Nanotechnol.</addtitle><date>2010-01-01</date><risdate>2010</risdate><volume>8</volume><spage>266</spage><epage>271</epage><pages>266-271</pages><issn>1348-0391</issn><eissn>1348-0391</eissn><abstract>We have developed an electron optical instrument for evaluation of multi emitters. The instrument is a versatile emission microscope and is capable of operating as a secondary electron emission microscope (SEEM), a photo electron emission microscope (PEEM) and a field electron emission microscope (FEEM) imaging modes. The most important feature of the instrument is the capability of simultaneous observation of SEEM and FEEM images as well as PEEM and FEEM images in real time and in-situ mode. The operating condition of the multi emitters can be observed in DC mode as well as pulse mode. 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| source | J-STAGE Free; DOAJ Directory of Open Access Journals; Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; Free Full-Text Journals in Chemistry |
| subjects | Electron emission Electron emission measurements Electronic publishing Emission Emission analysis Emitters Field electron emission microscopy (FEEM) Nano-electronics and related devices Nanotechnology Photo electron emission microscopy (PEEM) Real time Secondary electron emission microscopy (SEEM) |
| title | In-Situ, Real Time Observation of Operating Condition of Multi Emitters in Pulse Mode |
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