A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

Testing and characterization of micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test ME...

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Veröffentlicht in:	Microelectronics 2010-11, Vol.41 (11), p.778-788
Hauptverfasser:	Battini, Francesco, Volpi, Emilio, Marchetti, Eleonora, Cecchini, Tommaso, Sechi, Francesco, Fanucci, Luca, Hofmann, Ulrich
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer simulation Deflection Devices Equivalence Fast-developing Low-cost characterization Mathematical analysis Microelectromechanical systems Microelectromechanical systems (MEMS) Microelectronics Micromirror MOEMS Platforms Scanning Testing
Online-Zugang:	Volltext
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