Growth of crystalline garnet mixed films, superlattices and multilayers for optical applications via shuttered combinatorial pulsed laser deposition

A range of crystalline garnet multilayer structures have been fabricated via multi-beam, multi-target PLD in conjunction with a system of mechanical shutters. Structures grown consisted of alternating Gd3Ga5O12 (GGG) and Gd3Sc2Ga3O12 (GSGG) layers on Y3Al5O12 (YAG) substrates, with both simple and c...

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Veröffentlicht in:Optics express 2010-11, Vol.18 (24), p.24679-24687
Hauptverfasser: Sloyan, Katherine A, May-Smith, Timothy C, Zervas, Michalis, Eason, Robert W, Huband, Steven, Walker, David, Thomas, Pamela A
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container_end_page 24687
container_issue 24
container_start_page 24679
container_title Optics express
container_volume 18
creator Sloyan, Katherine A
May-Smith, Timothy C
Zervas, Michalis
Eason, Robert W
Huband, Steven
Walker, David
Thomas, Pamela A
description A range of crystalline garnet multilayer structures have been fabricated via multi-beam, multi-target PLD in conjunction with a system of mechanical shutters. Structures grown consisted of alternating Gd3Ga5O12 (GGG) and Gd3Sc2Ga3O12 (GSGG) layers on Y3Al5O12 (YAG) substrates, with both simple and chirped designs. Distinct layers are observed where layer thickness is around 2 nm or greater, although some layering may also be present at a sub-unit cell level. These structures demonstrate the viability of the shutter technique as a quick, simple fabrication method for a variety of optical multilayer structures.
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title Growth of crystalline garnet mixed films, superlattices and multilayers for optical applications via shuttered combinatorial pulsed laser deposition
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