Basic questions related to electron-induced sputtering in the TEM

Although the theory of high-angle elastic scattering of fast electrons is well developed, accurate calculation of the incident-energy threshold and cross section for surface-atom sputtering is hampered by uncertainties in the value of the surface-displacement energy E d and its angular dependence. W...

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Veröffentlicht in:	Ultramicroscopy 2010-07, Vol.110 (8), p.991-997
Hauptverfasser:	Egerton, R.F., McLeod, R., Wang, F., Malac, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon Cross sections Elastic scattering Knock-on displacement Mathematical analysis Radiation damage Sputtering Sublimation TEM Thin films Transmission electron microscopy
Online-Zugang:	Volltext
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