Two-spherical-wave ultraviolet interferometer for making an antireflective subwavelength periodic pattern on a curved surface

An ultraviolet two-spherical-wave interferometer was developed in order to make a subwavelength structured surface on a curved surface. The change in fringe period on the curved surface was significantly suppressed compared with the two-plane-wave interferometer. The optical setup method for suppres...

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Veröffentlicht in:Applied Optics 2010-11, Vol.49 (32), p.6268-6275
Hauptverfasser: Mizutani, Akio, Takahira, Shumpei, Kikuta, Hisao
Format: Artikel
Sprache:eng
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