Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure

We demonstrate a fully etched, continuously apodized fiber-to-chip surface grating coupler for the first time (to our knowledge). The device is fabricated in a single-etch step and operates with TM-polarized light, achieving a coupling efficiency of 3.7 dB and a 3 dB bandwidth of 60 nm. A subwavelen...

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Veröffentlicht in:Optics letters 2010-10, Vol.35 (19), p.3243-3245
Hauptverfasser: HALIR, R, CHEBEN, P, SCHMID, J. H, MA, R, BEDARD, D, JANZ, S, XU, D.-X, DENSMORE, A, LAPOINTE, J, MOLINA-FERNIINDEZ, I
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container_end_page 3245
container_issue 19
container_start_page 3243
container_title Optics letters
container_volume 35
creator HALIR, R
CHEBEN, P
SCHMID, J. H
MA, R
BEDARD, D
JANZ, S
XU, D.-X
DENSMORE, A
LAPOINTE, J
MOLINA-FERNIINDEZ, I
description We demonstrate a fully etched, continuously apodized fiber-to-chip surface grating coupler for the first time (to our knowledge). The device is fabricated in a single-etch step and operates with TM-polarized light, achieving a coupling efficiency of 3.7 dB and a 3 dB bandwidth of 60 nm. A subwavelength microstructure is employed to generate an effective medium engineered to vary the strength of the grating and thereby maximize coupling efficiency, while mitigating backreflections at the same time. Minimum feature size is 100 nm for compatibility with deep-UV 193 nm lithography.
doi_str_mv 10.1364/OL.35.003243
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subjects Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Optics
Physics
title Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure
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