Titanium carbide/carbon composite nanofibers prepared by a plasma process

The incorporation of metal or metal carbide nanoparticles into carbon nanofibers modifies their properties and enlarges their field of application. The purpose of this work is to report a new non-catalytic and easy method to prepare organized metal carbide-carbon composite nanofibers on nanopatterne...

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Veröffentlicht in:Nanotechnology 2010-10, Vol.21 (43), p.435603-435603
Hauptverfasser: Mel, A A El, Gautron, E, Choi, C H, Angleraud, B, Granier, A, Tessier, P Y
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container_end_page 435603
container_issue 43
container_start_page 435603
container_title Nanotechnology
container_volume 21
creator Mel, A A El
Gautron, E
Choi, C H
Angleraud, B
Granier, A
Tessier, P Y
description The incorporation of metal or metal carbide nanoparticles into carbon nanofibers modifies their properties and enlarges their field of application. The purpose of this work is to report a new non-catalytic and easy method to prepare organized metal carbide-carbon composite nanofibers on nanopatterned silicon substrates prepared by laser interference lithography coupled with deep reactive ion etching. Titanium carbide-carbon composite nanofibers were grown on the top of the silicon lines parallel to the substrate by a hybrid plasma process combining physical vapor deposition and plasma enhanced chemical vapor deposition. The prepared nanofibers were analyzed by scanning electron microscopy, x-ray photoelectron spectroscopy, Raman spectroscopy and transmission electron microscopy. We demonstrate that the shape, microstructure and the chemical composition of the as-grown nanofibers can be tuned by changing the plasma conditions.
doi_str_mv 10.1088/0957-4484/21/43/435603
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Carbon
Condensed Matter
Lithography
Materials Science
Nanofibers
Nanostructure
Nanotechnology
Physics
Scanning electron microscopy
Silicon substrates
Titanium
title Titanium carbide/carbon composite nanofibers prepared by a plasma process
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