Amplitude filter and Zernike polynomial expansion method for quality control of microlens arrays
This paper deals with a computer simulation and an experimental realization of an optical setup for automatic quality control of microlens arrays. The method is based on a 4f coherent light correlator setup with an amplitude filter placed in the Fourier plane. The output intensity signal is proporti...
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| Veröffentlicht in: | Applied Optics 2010-10, Vol.49 (28), p.5486-5492 |
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| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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