Effect of Structure and Size on the Electrical Properties of Nanocrystalline WO3 Films
Nanocrystalline WO3 films were grown by reactive magnetron sputter-deposition by varying the substrate temperature in the range of 303(RT)−673 K. The structure and electrical transport properties of WO3 films were evaluated using X-ray diffraction and dc electrical conductivity measurements. The eff...
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Veröffentlicht in: | ACS applied materials & interfaces 2010-09, Vol.2 (9), p.2623-2628 |
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Format: | Artikel |
Sprache: | eng |
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