Three-dimensional analysis by a microlens-array confocal arrangement

Scanning confocal microscopy is now well developed and applied. As an alternative to a laser spot to be scanned, parallel processing can be obtained when a two-dimensional structure is moved through the focal plane and a series of image sections is recorded. Surface topography is determined by analy...

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Veröffentlicht in:	Applied Optics 1994-02, Vol.33 (4), p.567-572
Hauptverfasser:	Tiziani, H J, Uhde, H M
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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