Applications of Microstructured Silicon Wafers as Internal Reflection Elements in Attenuated Total Reflection Fourier Transform Infrared Spectroscopy

A novel internal reflection element (IRE) for attenuated total reflection Fourier transform infrared (ATR-FT-IR) spectral acquisition is introduced and applied for several surface-sensitive measurements. It is based on microstructured double-side-polished (100) silicon wafers with v-shaped grooves o...

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Veröffentlicht in:	Applied spectroscopy 2010-09, Vol.64 (9), p.1022-1027
Hauptverfasser:	Schumacher, Henrik, Künzelmann, Ulrich, Vasilev, Boris, Eichhorn, Klaus-Jochen, Bartha, Johann W.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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